Targets and processes for fabricating same
Abstract
In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 .mu.m. In particular examples, the distance is less than about 1 .mu.m. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.
- Inventors:
-
- Dresden, DE
- Reno, NV
- Paris, FR
- Publication Date:
- Research Org.:
- Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno (Reno, NV)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1067331
- Patent Number(s):
- 8,229,075
- Application Number:
- 12/066,479
- Assignee:
- Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno (Reno, NV)
- DOE Contract Number:
- FC52-01NV14050
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Cowan, Thomas, Malekos, Steven, Korgan, Grant, Adams, Jesse, Sentoku, Yasuhiko, Le Galloudec, Nathalie, and Fuchs, Julien. Targets and processes for fabricating same. United States: N. p., 2012.
Web.
Cowan, Thomas, Malekos, Steven, Korgan, Grant, Adams, Jesse, Sentoku, Yasuhiko, Le Galloudec, Nathalie, & Fuchs, Julien. Targets and processes for fabricating same. United States.
Cowan, Thomas, Malekos, Steven, Korgan, Grant, Adams, Jesse, Sentoku, Yasuhiko, Le Galloudec, Nathalie, and Fuchs, Julien. 2012.
"Targets and processes for fabricating same". United States. https://www.osti.gov/servlets/purl/1067331.
@article{osti_1067331,
title = {Targets and processes for fabricating same},
author = {Cowan, Thomas and Malekos, Steven and Korgan, Grant and Adams, Jesse and Sentoku, Yasuhiko and Le Galloudec, Nathalie and Fuchs, Julien},
abstractNote = {In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 .mu.m. In particular examples, the distance is less than about 1 .mu.m. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.},
doi = {},
url = {https://www.osti.gov/biblio/1067331},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 24 00:00:00 EDT 2012},
month = {Tue Jul 24 00:00:00 EDT 2012}
}
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