Low loss, high and low index contrast waveguides in semiconductors

Bond, Tiziana; Cole, Garrett; Goddard, Lynford; Kallman, Jeff

Title: Low loss, high and low index contrast waveguides in semiconductors

Patent · Tue Aug 09 00:00:00 EDT 2011

OSTI ID:1025608

Bond, Tiziana ^[1]; Cole, Garrett ^[2]; Goddard, Lynford ^[3]; Kallman, Jeff ^[4]

Livermore, CA
Berkeley, CA
Champaign, IL
Pleasanton, CA

A system in one general embodiment includes a waveguide structure comprising a core of an alloy of Group III-V materials surrounded by an oxide (which may include one or more Group III-V metals), wherein an interface of the oxide and core is characterized by oxidation of the alloy for defining the core. A method in one general approach includes oxidizing a waveguide structure comprising an alloy of Group III-V materials for forming a core of the alloy surrounded by an oxide.

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Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-07NA27344

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 7,995,892

Application Number:: 12/129,503

OSTI ID:: 1025608

Country of Publication:: United States

Language:: English

References (4)

Native oxides on AlGaAs epilayer Ghita, R. V.; Vasile, E.; Cengher, D. Thin Solid Films, Vol. 338, Issue 1-2 https://doi.org/10.1016/S0040-6090(98)00973-0	journal	January 1999
Reduction of etched AlGaAs sidewall roughness by oxygen-enhanced wet thermal oxidation Liang, D.; Hall, D. C. Applied Physics Letters, Vol. 91, Issue 6 https://doi.org/10.1063/1.2766859	journal	August 2007
Advances in selective wet oxidation of AlGaAs alloys Choquette, K. D.; Geib, K. M.; Ashby, C. I. H. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 3, Issue 3, p. 916-926 https://doi.org/10.1109/2944.640645	journal	June 1997
Near-infrared refractive index of thick, laterally oxidized AlGaAs cladding layers Sfigakis, F.; Paddon, P.; Pacradouni, V. Journal of Lightwave Technology, Vol. 18, Issue 2 https://doi.org/10.1109/50.822793	journal	February 2000

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