Characterization and possible repair of defects in Soft X-ray Projection Lithography masks
Soft X-ray Projection Lithography (SXPL) is one promising technique for the mass production of integrated circuits with minimum features sizes below 100 nm. Mask fabrication, inspection and repair processes are critically important to all forms of lithography, including SXPL which requires a reflection mask (a substrate coated with a x-ray multilayer coating and patterned with thin metallization layer). Processes for the repair of defects in the metallization patterns have been developed, but at present, there exist no processes for the repair of defects in the multilayer coatings deposited in LLNL`s magnetron sputter deposition facility, which produces state of the art x-ray multilayer mirrors. We also propose one possible process for the repair of defects in these multilayer coatings.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 10181604
- Report Number(s):
- UCRL-JC-114416; CONF-9305159-4; ON: DE93019147
- Resource Relation:
- Conference: Optical Society of America (OSA) topical meeting on soft x-ray projection lithography,Monterey, CA (United States),10-12 May 1993; Other Information: PBD: Jul 1993
- Country of Publication:
- United States
- Language:
- English
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