Formation of buried epitaxial Si-Ge alloy layers in Si<100>crystal by high dose Ge ion implantation
We have synthesized single crystal Si{sub 1-x}Ge{sub x} alloy layers in Si <100> crystals by high dose Ge ion implantation and solid phase epitaxy. The implantation was performed using the metal vapor vacuum arc (Mevva) ion source. Ge ions at mean energies of 70 and 1000 keV and with doses ranging from 1{times}10{sup 16} to 7{times}10{sup 16} ions/cm{sup 2} were implanted into Si <100> crystals at room temperature, resulting in the formation of Si{sub 1-x}Ge{sub x} alloy layers with peak Ge concentrations of 4 to 13 atomic %. Epitaxial regrowth of the amorphous layers were initiated by thermal annealing at temperatures higher than 500{degrees}C. The solid phase epitaxy process, the crystal quality, microstructures, interface morphology and defect structures were characterized by ion channeling and transmission electron microscopy. Compositionally graded single crystal Si{sub 1-x}Ge{sub x} layers with full width at half maximum {approximately}100nm were formed under a {approximately}30nm Si layer after annealing at 600{degrees}C for 15 min. A high density of defects was found in the layers as well as in the substrate Si just below the original amorphous/crystalline interface. The concentration of these defects was significantly reduced after annealing at 900{degrees}C. The kinetics of the regrowth process, the crystalline quality of the alloy layers, the annealing characteristics of the defects, and the strains due to the lattice mismatch between the alloy and the substrate are discussed.
- Research Organization:
- Lawrence Berkeley Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 10164004
- Report Number(s):
- LBL-30989; CONF-911202-82; ON: DE92017114
- Resource Relation:
- Conference: Annual fall meeting of the Materials Research Society (MRS),Boston, MA (United States),2-6 Dec 1991; Other Information: PBD: Nov 1991
- Country of Publication:
- United States
- Language:
- English
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