Determining surface profile from sequential interference patterns from a long trace profiler

Conference · Mon Jul 01 00:00:00 EDT 1991

OSTI ID:10159909

Irick, S C

The Long Trace Profiler (Takacs et al.) is a slope-measuring instrument which was introduced several years ago. Development of this instrument continues at Lawrence Berkeley Laboratory in improving both hardware design and software algorithms for turning the raw interference data (a sequence of intensity patterns) into properly interpreted representations of surface slope and height. This report presents a mathematical model of the interference pattern and methods of extracting the slope and height profile from such patterns. 9 refs.

• Research Organization: Lawrence Berkeley Lab., CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 10159909
• Report Number(s): LBL-30464; CONF-910730-31; ON: DE92017117
• Resource Relation: Conference: 4. international conference on synchrotron radiation instrumentation,Chester (United Kingdom),15-19 Jul 1991; Other Information: PBD: Jul 1991
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
BEAM OPTICS
MIRRORS
SURFACE PROPERTIES
DIFFRACTION GRATINGS
INTERFERENCE
MATHEMATICAL MODELS
BEAM PROFILES
FOURIER TRANSFORMATION
SURFACES
NOISE
430303
661300
990200
EXPERIMENTAL FACILITIES AND EQUIPMENT
OTHER ASPECTS OF PHYSICAL SCIENCE
MATHEMATICS AND COMPUTERS