Thin film production method and apparatus
Patent
·
OSTI ID:1013838
- Tucson, AZ
A method for forming a thin film material which comprises depositing solid particles from a flowing suspension or aerosol onto a filter and next adhering the solid particles to a second substrate using an adhesive.
- Research Organization:
- Materials and Electrochemical Research (MER) Corporation (Tucson, AZ)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG03-01ER83281
- Assignee:
- Materials and Electrochemical Research (MER) Corporation (Tucson, AZ)
- Patent Number(s):
- 7,771,784
- Application Number:
- 11/885,659
- OSTI ID:
- 1013838
- Country of Publication:
- United States
- Language:
- English
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