Silicon fiber optic sensors
Patent
·
OSTI ID:917190
- Livermore, CA
A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Number(s):
- 7,277,605
- Application Number:
- 11/132,663
- OSTI ID:
- 917190
- Country of Publication:
- United States
- Language:
- English
Similar Records
Optical Fiber Sensor Instrumentation for Slagging Coal Gasifiers
Fiber optic micro accelerometer
Extrinsic fiber optic displacement sensors and displacement sensing systems
Technical Report
·
Sat Jul 19 00:00:00 EDT 2008
·
OSTI ID:917190
Fiber optic micro accelerometer
Patent
·
Tue Jul 26 00:00:00 EDT 2005
·
OSTI ID:917190
Extrinsic fiber optic displacement sensors and displacement sensing systems
Patent
·
Tue Apr 05 00:00:00 EDT 1994
·
OSTI ID:917190
+1 more