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Title: High density arrays of micromirrors

Abstract

We established and achieved our goal to (1) fabricate and evaluate test structures based on the micromirror design optimized for maskless lithography applications, (2) perform system analysis and code development for the maskless lithography concept, and (3) identify specifications for micromirror arrays (MMAs) for LLNL's adaptive optics (AO) applications and conceptualize new devices.

Authors:
 [1];  [1];  [1];  [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE Office of Defense Programs (DP)
OSTI Identifier:
8222
Report Number(s):
UCRL-ID-133164
YN0100000; 97-ERD-078; ON: DE00008222
DOE Contract Number:  
W-7405-Eng-48
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; Mirrors; Fabrication; Evaluation

Citation Formats

Folta, J. M., Decker, J. Y., Kolman, J., Lee, C., and Brase, J. M. High density arrays of micromirrors. United States: N. p., 1999. Web. doi:10.2172/8222.
Folta, J. M., Decker, J. Y., Kolman, J., Lee, C., & Brase, J. M. High density arrays of micromirrors. United States. https://doi.org/10.2172/8222
Folta, J. M., Decker, J. Y., Kolman, J., Lee, C., and Brase, J. M. 1999. "High density arrays of micromirrors". United States. https://doi.org/10.2172/8222. https://www.osti.gov/servlets/purl/8222.
@article{osti_8222,
title = {High density arrays of micromirrors},
author = {Folta, J. M. and Decker, J. Y. and Kolman, J. and Lee, C. and Brase, J. M.},
abstractNote = {We established and achieved our goal to (1) fabricate and evaluate test structures based on the micromirror design optimized for maskless lithography applications, (2) perform system analysis and code development for the maskless lithography concept, and (3) identify specifications for micromirror arrays (MMAs) for LLNL's adaptive optics (AO) applications and conceptualize new devices.},
doi = {10.2172/8222},
url = {https://www.osti.gov/biblio/8222}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Feb 01 00:00:00 EST 1999},
month = {Mon Feb 01 00:00:00 EST 1999}
}