Micromachining technology for advanced weapon systems

Conference · Tue Dec 31 00:00:00 EST 1996

OSTI ID:454020

Sniegowski, J J

An overview of planned uses for polysilicon surface-micromachining technology in advanced weapon systems is presented. Specifically, this technology may allow consideration of fundamentally new architectures for realization of surety component functions.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 454020
• Report Number(s): SAND-96-1934C; CONF-970329-4; ON: DE97001878
• Resource Relation: Conference: Government microcircuit applications conference: power electronics - from micro to kilo and beyond, Las Vegas, NV (United States), 10-14 Mar 1997; Other Information: PBD: [1996]
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
INTEGRATED CIRCUITS
FABRICATION
EQUIPMENT INTERFACES
MACHINE PARTS
MICROELECTRONICS
SURFACE COATING
SURFACE FINISHING
SURFACE TREATMENTS
SILICON OXIDES
LAYERS
ELECTRIC CONDUCTORS
CONNECTORS
CHEMICAL POLISHING
MECHANICAL POLISHING