Analysis of a planetary-rotation system for evaporated optical coatings
- Univ. of Rochester, Rochester, NY (United States)
The impact of planetary-design considerations for optical coating deposition is analyzed, including the ideal number of planets, variations in system performance, and the deviation of planet motion from the ideal. System capacity is maximized for four planets, although substrate size can significantly influence this result. Guidance is provided in the design of high-performance deposition systems based on the relative impact of different error modes. As a result, errors in planet mounting such that the planet surface is not perpendicular to its axis of rotation are particularly problematic, suggesting planetary design modifications would be appropriate.
- Research Organization:
- Univ. of Rochester, NY (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- Grant/Contract Number:
- NA0001944
- OSTI ID:
- 1330097
- Alternate ID(s):
- OSTI ID: 1329087
- Journal Information:
- Applied Optics, Vol. 55, Issue 30; ISSN 0003-6935
- Publisher:
- Optical Society of America (OSA)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 10 works
Citation information provided by
Web of Science
Web of Science
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