Fabrication method for small-scale structures with non-planar features

Burckel, David Bruce; Ten Eyck, Gregory A.

Title: Fabrication method for small-scale structures with non-planar features

Patent · Tue Sep 20 00:00:00 EDT 2016

OSTI ID:1325765

Burckel, David Bruce; Ten Eyck, Gregory A.

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albquerque, NM)

Patent Number(s):: 9,448,336

Application Number:: 14/548,070

OSTI ID:: 1325765

Resource Relation:: Patent File Date: 2014 Nov 19

Country of Publication:: United States

Language:: English

References (19)

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