Multi-channel gas-delivery system
Patent
·
OSTI ID:1324687
One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.
- Research Organization:
- SolarCity Corporation, San Mateo, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0000589
- Assignee:
- SolarCity Corporation (San Mateo, CA)
- Patent Number(s):
- 9,441,295
- Application Number:
- 12/952,127
- OSTI ID:
- 1324687
- Resource Relation:
- Patent File Date: 2010 Nov 22
- Country of Publication:
- United States
- Language:
- English
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