An in situ transmission electron microscopy study of the ion irradiation induced amorphisation of silicon by He and Xe

Edmondson, P. D.; Abrams, K. J.; Hinks, J. A.; Greaves, G.; Pawley, C. J.; Hanif, I.; Donnelly, S. E.

doi:10.1016/j.scriptamat.2015.11.010

Title: An in situ transmission electron microscopy study of the ion irradiation induced amorphisation of silicon by He and Xe

Journal Article · Sat Nov 21 00:00:00 EST 2015 · Scripta Materialia

DOI:https://doi.org/10.1016/j.scriptamat.2015.11.010· OSTI ID:1286947

^[1]; Abrams, K. J. ^[2]; Hinks, J. A. ^[3]; Greaves, G. ^[3]; Pawley, C. J. ^[3]; Hanif, I. ^[3]; Donnelly, S. E. ^[3]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Univ.of Sheffield (United Kingdom)
Univ. of Huddersfield (United Kingdom)

We used transmission electron microscopy with in situ ion irradiation to examine the ion-beam-induced amorphisation of crystalline silicon under irradiation with light (He) and heavy (Xe) ions at room temperature. Analysis of the electron diffraction data reveal the heterogeneous amorphisation mechanism to be dominant in both cases. Moreover, for the differences in the amorphisation curves are discussed in terms of intra-cascade dynamic recovery, and the role of electronic and nuclear loss mechanisms.

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Research Organization:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1286947

Journal Information:: Scripta Materialia, Vol. 113, Issue C; ISSN 1359-6462

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 12 works

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References (19)

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Ion-beam-induced bending of semiconductor nanowires Hanif, Imran; Camara, Osmane; Tunes, Matheus A. Nanotechnology, Vol. 29, Issue 33 https://doi.org/10.1088/1361-6528/aac659	journal	June 2018
Shape Modification of Germanium Nanowires during Ion Irradiation and Subsequent Solid-Phase Epitaxial Growth Camara, Osmane; Hanif, Imran; Tunes, Matheus Advanced Materials Interfaces, Vol. 5, Issue 13 https://doi.org/10.1002/admi.201800276	journal	May 2018

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