Fundamental edge broadening effects during focused electron beam induced nanosynthesis

Schmied, Roland; Fowlkes, Jason Davidson; Winkler, Robert; Rack, Phillip D.; Plank, Harald

doi:10.3762/bjnano.6.47

Title: Fundamental edge broadening effects during focused electron beam induced nanosynthesis

Journal Article · Mon Feb 16 00:00:00 EST 2015 · Beilstein Journal of Nanotechnology

DOI:https://doi.org/10.3762/bjnano.6.47· OSTI ID:1265378

Schmied, Roland ^[1]; Fowlkes, Jason Davidson ^[2]; Winkler, Robert ^[1]; Rack, Phillip D. ^[2]; Plank, Harald ^[3]

Graz Center for Electron Microscopy, Graz (Austria)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science (CNMS); Univ. of Tennessee, Knoxville, TN (United States)
Graz Center for Electron Microscopy, Graz (Austria) ; Graz Univ. of Technology (Austria)

In this study, we explore lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me₃ precursor. In particular, the scaling behavior of proximity effects as a function of the primary electron energy and the deposit height is investigated through experiments and validated through simulations. Correlated Kelvin force microscopy and conductive atomic force microscopy measurements identified conductive and non-conductive proximity regions. It was determined that the highest primary electron energies enable the highest edge sharpness while lower energies contain a complex convolution of broadening effects. In addition, it is demonstrated that intermediate energies lead to even more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1265378

Journal Information:: Beilstein Journal of Nanotechnology, Vol. 6; ISSN 2190-4286

Publisher:: Beilstein InstituteCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 20 works

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References (50)

Focused, Nanoscale Electron-Beam-Induced Deposition and Etching Randolph, S. J.; Fowlkes, J. D.; Rack, P. D. Critical Reviews in Solid State and Materials Sciences, Vol. 31, Issue 3 https://doi.org/10.1080/10408430600930438	journal	September 2006
Gas-assisted focused electron beam and ion beam processing and fabrication Utke, Ivo; Hoffmann, Patrik; Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 4 https://doi.org/10.1116/1.2955728	journal	January 2008
A critical literature review of focused electron beam induced deposition van Dorp, W. F.; Hagen, C. W. Journal of Applied Physics, Vol. 104, Issue 8 https://doi.org/10.1063/1.2977587	journal	October 2008
The role of electron-stimulated desorption in focused electron beam induced deposition van Dorp, Willem F.; Hansen, Thomas W.; Wagner, Jakob B. Beilstein Journal of Nanotechnology, Vol. 4 https://doi.org/10.3762/bjnano.4.56	journal	January 2013
Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective Botman, A.; Mulders, J. J. L.; Hagen, C. W. Nanotechnology, Vol. 20, Issue 37 https://doi.org/10.1088/0957-4484/20/37/372001	journal	August 2009
In situ control of the focused-electron-beam-induced deposition process Bret, T.; Utke, I.; Bachmann, A. Applied Physics Letters, Vol. 83, Issue 19 https://doi.org/10.1063/1.1626261	journal	November 2003
Small, Minimally Invasive, Direct: Electrons Induce Local Reactions of Adsorbed Functional Molecules on the Nanoscale Utke, Ivo; Gölzhäuser, Armin Angewandte Chemie International Edition, Vol. 49, Issue 49 https://doi.org/10.1002/anie.201002677	journal	September 2010
The influence of beam defocus on volume growth rates for electron beam induced platinum deposition Plank, H.; Gspan, C.; Dienstleder, M. Nanotechnology, Vol. 19, Issue 48 https://doi.org/10.1088/0957-4484/19/48/485302	journal	November 2008
Chemical tuning of PtC nanostructures fabricated via focused electron beam induced deposition Plank, Harald; Haber, Thomas; Gspan, Christian Nanotechnology, Vol. 24, Issue 17 https://doi.org/10.1088/0957-4484/24/17/175305	journal	April 2013
Resolution in focused electron- and ion-beam induced processing Utke, Ivo; Friedli, Vinzenz; Purrucker, Martin Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2789441	journal	January 2007
Fundamental Electron-Precursor-Solid Interactions Derived from Time-Dependent Electron-Beam-Induced Deposition Simulations and Experiments Fowlkes, Jason D.; Rack, Philip D. ACS Nano, Vol. 4, Issue 3 https://doi.org/10.1021/nn901363a	journal	March 2010
Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Small, Vol. 4, Issue 9 https://doi.org/10.1002/smll.200701133	journal	September 2008
Growth and simulation of high-aspect ratio nanopillars by primary and secondary electron-induced deposition Fowlkes, J. D.; Randolph, S. J.; Rack, P. D. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6 https://doi.org/10.1116/1.2101732	journal	January 2005
Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si van Oven, J. C.; Berwald, F.; Berggren, K. K. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6 https://doi.org/10.1116/1.3640743	journal	November 2011
Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy van Dorp, W. F.; Wnuk, J. D.; Gorham, J. M. Journal of Applied Physics, Vol. 106, Issue 7 https://doi.org/10.1063/1.3225091	journal	October 2009
Growth and Microstructure of Nanoscale Amorphous Carbon Nitride Films Deposited by Electron Beam Irradiation of 1,2-Diaminopropane Wnuk, Joshua D.; Gorham, Justin M.; Fairbrother, D. Howard The Journal of Physical Chemistry C, Vol. 113, Issue 28 https://doi.org/10.1021/jp900966m	journal	June 2009
Fundamental Proximity Effects in Focused Electron Beam Induced Deposition Plank, Harald; Smith, Daryl A.; Haber, Thomas ACS Nano, Vol. 6, Issue 1 https://doi.org/10.1021/nn204237h	journal	December 2011
Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Nanotechnology, Vol. 19, Issue 41 https://doi.org/10.1088/0957-4484/19/41/415704	journal	September 2008
Electron beam induced deposition at elevated temperatures: compositional changes and purity improvement Mulders, J. J. L.; Belova, L. M.; Riazanova, A. Nanotechnology, Vol. 22, Issue 5 https://doi.org/10.1088/0957-4484/22/5/055302	journal	December 2010
High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current Córdoba, R.; Sesé, J.; De Teresa, J. M. Microelectronic Engineering, Vol. 87, Issue 5-8 https://doi.org/10.1016/j.mee.2009.11.027	journal	May 2010
In situ laser processing in a scanning electron microscope Roberts, Nicholas A.; Magel, Gregory A.; Hartfield, Cheryl D. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 4 https://doi.org/10.1116/1.4731254	journal	July 2012
Effects of Water Vapour on Electron and Ion Beam Deposited Platinum Langford, Richard M.; Ozkaya, Dogan; Sheridan, J. Microscopy and Microanalysis, Vol. 10, Issue S02 https://doi.org/10.1017/S1431927604883417	journal	August 2004
Metal delocalization and surface decoration in direct-write nanolithography by electron beam induced deposition Gopal, Vidyut; Stach, Eric A.; Radmilovic, Velimir R. Applied Physics Letters, Vol. 85, Issue 1 https://doi.org/10.1063/1.1765736	journal	July 2004
Purification of platinum and gold structures after electron-beam-induced deposition Botman, A.; Mulders, J. J. L.; Weemaes, R. Nanotechnology, Vol. 17, Issue 15 https://doi.org/10.1088/0957-4484/17/15/028	journal	July 2006
Reducing the resistivity of electron and ion beam assisted deposited Pt Langford, R. M.; Wang, T. -X.; Ozkaya, D. Microelectronic Engineering, Vol. 84, Issue 5-8 https://doi.org/10.1016/j.mee.2007.01.055	journal	May 2007
Focused electron beam induced deposition: A perspective Huth, Michael; Porrati, Fabrizio; Schwalb, Christian Beilstein Journal of Nanotechnology, Vol. 3 https://doi.org/10.3762/bjnano.3.70	journal	January 2012
A Tunable Strain Sensor Using Nanogranular Metals Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus Sensors, Vol. 10, Issue 11 https://doi.org/10.3390/s101109847	journal	November 2010
Fabrication by electron beam induced deposition and transmission electron microscopic characterization of sub-10-nm freestanding Pt nanowires Frabboni, S.; Gazzadi, G. C.; Felisari, L. Applied Physics Letters, Vol. 88, Issue 21 https://doi.org/10.1063/1.2206996	journal	May 2006
Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits Plank, Harald; Kothleitner, Gerald; Hofer, Ferdinand Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 5 https://doi.org/10.1116/1.3622314	journal	September 2011
Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H ₂ O Reactions Geier, Barbara; Gspan, Christian; Winkler, Robert The Journal of Physical Chemistry C, Vol. 118, Issue 25 https://doi.org/10.1021/jp503442b	journal	June 2014
Catalytic Purification of Directly Written Nanostructured Pt Microelectrodes Sachser, Roland; Reith, Heiko; Huzel, Daniel ACS Applied Materials & Interfaces, Vol. 6, Issue 18 https://doi.org/10.1021/am503407y	journal	September 2014
Focused electron beam induced deposition of a periodic transparent nano-optic pattern Perentes, A. Microelectronic Engineering, Vol. 73-74 https://doi.org/10.1016/S0167-9317(04)00146-7	journal	June 2004
Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry Utke, Ivo; Jenke, Martin G.; Röling, Christian Nanoscale, Vol. 3, Issue 7 https://doi.org/10.1039/c1nr10047e	journal	January 2011
Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition Gavagnin, Marco; Wanzenboeck, Heinz D.; Belić, Domagoj ACS Nano, Vol. 7, Issue 1 https://doi.org/10.1021/nn305079a	journal	December 2012
Single Superparamagnetic Bead Detection and Direct Tracing of Bead Position Using Novel Nanocomposite Nano-Hall Sensors Gabureac, Mihai S.; Bernau, Laurent; Boero, Giovanni IEEE Transactions on Nanotechnology, Vol. 12, Issue 5 https://doi.org/10.1109/TNANO.2013.2266733	journal	September 2013
Ultrasmall Functional Ferromagnetic Nanostructures Grown by Focused Electron-Beam-Induced Deposition Serrano-Ramón, Luis; Córdoba, Rosa; Rodríguez, Luis Alfredo ACS Nano, Vol. 5, Issue 10 https://doi.org/10.1021/nn201517r	journal	September 2011
Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition Fernández-Pacheco, A.; De Teresa, J. M.; Córdoba, R. Journal of Physics D: Applied Physics, Vol. 42, Issue 5 https://doi.org/10.1088/0022-3727/42/5/055005	journal	February 2009
Granular Co–C nano-Hall sensors by focused-beam-induced deposition Gabureac, Mihai; Bernau, Laurent; Utke, Ivo Nanotechnology, Vol. 21, Issue 11 https://doi.org/10.1088/0957-4484/21/11/115503	journal	February 2010
Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation Porrati, F.; Sachser, R.; Schwalb, C. H. Journal of Applied Physics, Vol. 109, Issue 6 https://doi.org/10.1063/1.3559773	journal	March 2011
Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensing Kolb, Florian; Schmoltner, Kerstin; Huth, Michael Nanotechnology, Vol. 24, Issue 30 https://doi.org/10.1088/0957-4484/24/30/305501	journal	July 2013
Size and shape control of sub-20 nm patterns fabricated using focused electron beam-induced processing Hari, Sangeetha; Hagen, Cornelis W.; Verduin, Thomas Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 3 https://doi.org/10.1117/1.JMM.13.3.033002	journal	July 2014
Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis Arnold, Georg; Timilsina, Rajendra; Fowlkes, Jason ACS Applied Materials & Interfaces, Vol. 6, Issue 10 https://doi.org/10.1021/am5008003	journal	May 2014
The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition Winkler, Robert; Fowlkes, Jason; Szkudlarek, Aleksandra ACS Applied Materials & Interfaces, Vol. 6, Issue 4 https://doi.org/10.1021/am405591d	journal	February 2014
Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds Winkler, Robert; Geier, Barbara; Plank, Harald Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8496-y	journal	May 2014
CASINO V2.42—A Fast and Easy-to-use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users Drouin, Dominique; Couture, Alexandre Réal; Joly, Dany Scanning, Vol. 29, Issue 3 https://doi.org/10.1002/sca.20000	journal	January 2007
Electron-beam-induced deposition of platinum at low landing energies Botman, A.; de Winter, D. A. M.; Mulders, J. J. L. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 6 https://doi.org/10.1116/1.2976576	journal	November 2008
The role of electron scattering in electron-induced surface chemistry van Dorp, Willem F. Physical Chemistry Chemical Physics, Vol. 14, Issue 48 https://doi.org/10.1039/c2cp42275a	journal	January 2012
Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition Spencer, Julie A.; Rosenberg, Samantha G.; Barclay, Michael Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8570-5	journal	July 2014
Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation Winkler, Robert; Szkudlarek, Aleksandra; Fowlkes, Jason D. ACS Applied Materials & Interfaces, Vol. 7, Issue 5 https://doi.org/10.1021/am508052k	journal	January 2015
Electron range effects in focused electron beam induced deposition of 3D nanostructures Bret, Tristan; Utke, Ivo; Hoffmann, Patrik Microelectronic Engineering, Vol. 83, Issue 4-9 https://doi.org/10.1016/j.mee.2006.01.146	journal	April 2006

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