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Title: Heteroepitaxial growth of Pt and Au thin films on MgO single crystals by bias-assisted sputtering

Journal Article · · Scientific Reports
DOI:https://doi.org/10.1038/srep23232· OSTI ID:1255225

The crystallographic orientation of a metal affects its surface energy and structure, and has profound implications for surface chemical reactions and interface engineering, which are important in areas ranging from optoelectronic device fabrication to catalysis. However, it can be very difficult and expensive to manufacture, orient, and cut single crystal metals along different crystallographic orientations, especially in the case of precious metals. One approach is to grow thin metal films epitaxially on dielectric substrates. In this work, we report on growth of Pt and Au films on MgO single crystal substrates of (100) and (110) surface orientation for use as epitaxial templates for thin film photovoltaic devices. We develop bias-assisted sputtering for deposition of oriented Pt and Au films with sub-nanometer roughness. We show that biasing the substrate decreases the substrate temperature necessary to achieve epitaxial orientation, with temperature reduction from 600 to 350 °C for Au, and from 750 to 550 °C for Pt, without use of transition metal seed layers. Additionally, this temperature can be further reduced by reducing the growth rate. Biased deposition with varying substrate bias power and working pressure also enables control of the film morphology and surface roughness.

Research Organization:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
SC0004993
OSTI ID:
1255225
Journal Information:
Scientific Reports, Vol. 6; ISSN 2045-2322
Publisher:
Nature Publishing GroupCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 18 works
Citation information provided by
Web of Science

References (14)

Morphology of Pt islands grown on MgO(001) journal May 2003
Rapid biaxial texture development during nucleation of MgO thin films during ion beam-assisted deposition journal May 2002
Ultrathin metal films and particles on oxide surfaces: structural, electronic and chemisorptive properties journal January 1997
Epitaxy of Pt thin films on (001) MgO—II: Orientation evolution from nucleation through coalescence journal February 1997
Size- and temperature-dependent epitaxy for a strong film-substrate mismatch: The case of Pt Mg O ( 001 ) journal August 2007
Epitaxial Pt(001), Pt(110), and Pt(111) films on MgO(001), MgO(110), MgO(111), and Al 2 O 3 (0001) journal September 1992
Molecular beam epitaxial growth of Au(110) layers on MgO(110) substrates journal June 1993
The alignment of gold particles on MgO crystal faces journal October 1984
Morphology of Nuclei and Epitaxial Behavior of Au and Ag on MgO journal January 1971
Effect of polar surface on the growth of Au journal January 2015
Particle bombardment effects on thin‐film deposition: A review journal May 1989
Growth mechanisms of laser deposited BiSrCaCuO films on MgO substrates journal January 1998
Change of growth orientation in Pt films epitaxially grown on MgO(001) substrates by sputtering journal September 2002
Epitaxial growth of metals by sputter deposition journal November 1996

Cited By (5)

Texture and interface characterization of iridium thin films grown on MgO substrates with different orientations journal September 2019
Surface preparation and the evolution of atomically flat step terrace morphology of MgO single crystals journal September 2018
Epitaxial Co 50 Fe 50 (110)/Pt(111) films on MgAl 2 O 4 (001) and its enhancement of perpendicular magnetic anisotropy journal May 2019
Bias voltage dependent structure and morphology evolution of magnetron sputtered YSZ thin film: a basic insight journal August 2019
Epitaxial Versus Polycrystalline Shape Memory Cu-Al-Ni Thin Films journal May 2019