Stabilizing laser energy density on a target during pulsed laser deposition of thin films

Dowden, Paul C.; Jia, Quanxi

Title: Stabilizing laser energy density on a target during pulsed laser deposition of thin films

Patent · Tue May 31 00:00:00 EDT 2016

OSTI ID:1255208

Dowden, Paul C.; Jia, Quanxi

A process for stabilizing laser energy density on a target surface during pulsed laser deposition of thin films controls the focused laser spot on the target. The process involves imaging an image-aperture positioned in the beamline. This eliminates changes in the beam dimensions of the laser. A continuously variable attenuator located in between the output of the laser and the imaged image-aperture adjusts the energy to a desired level by running the laser in a "constant voltage" mode. The process provides reproducibility and controllability for deposition of electronic thin films by pulsed laser deposition.

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Research Organization:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-06NA25396

Assignee:: Los Alamos National Security, LLC (Los Alamos, NM)

Patent Number(s):: 9,353,435

Application Number:: 14/042,167

OSTI ID:: 1255208

Resource Relation:: Patent File Date: 2013 Sep 30

Country of Publication:: United States

Language:: English

References (12)

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