Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects
Journal Article
·
· Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Materials Sciences Division
- OSTI ID:
- 1240628
- Report Number(s):
- LBNL-176705; ir:176705
- Journal Information:
- Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics, Vol. 33, Issue 2; ISSN 2166-2746
- Publisher:
- American Vacuum Society/AIP
- Country of Publication:
- United States
- Language:
- English
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