A New Paradigm for X-ray Optics Nanopositioning Final Technical Report
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Univ. of Illinois, Champaign, IL (United States)
- Royston Engineering Research, Chicago, IL (United States)
Final report on A New Paradigm for X-ray Optics Nanopositioning. This detials control work and flexure stage design for an X-ray optic nanopositioning device.
- Research Organization:
- Royston Engineering Research
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- SC0004283
- OSTI ID:
- 1237040
- Report Number(s):
- DOE-ANL-0004283; 6302523020
- Country of Publication:
- United States
- Language:
- English
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