A fully integrated oven controlled microelectromechanical oscillator – Part II. Characterization and measurement
Abstract
Our paper reports the measurement and characterization of a fully integrated oven controlled microelectromechanical oscillator (OCMO). The OCMO takes advantage of high thermal isolation and monolithic integration of both aluminum nitride (AlN) micromechanical resonators and electronic circuitry to thermally stabilize or ovenize all the components that comprise an oscillator. Operation at microscale sizes allows implementation of high thermal resistance platform supports that enable thermal stabilization at very low-power levels when compared with the state-of-the-art oven controlled crystal oscillators. A prototype OCMO has been demonstrated with a measured temperature stability of -1.2 ppb/°C, over the commercial temperature range while using tens of milliwatts of supply power and with a volume of 2.3 mm3 (not including the printed circuit board-based thermal control loop). Additionally, due to its small thermal time constant, the thermal compensation loop can maintain stability during fast thermal transients (>10 °C/min). This new technology has resulted in a new paradigm in terms of power, size, and warm up time for high thermal stability oscillators.
- Authors:
-
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1236202
- Report Number(s):
- SAND-2015-0202J
Journal ID: ISSN 1057-7157; 562129
- Grant/Contract Number:
- AC04-94AL85000
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Journal of Microelectromechanical Systems
- Additional Journal Information:
- Journal Volume: 24; Journal Issue: 6; Journal ID: ISSN 1057-7157
- Publisher:
- IEEE
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; oscillator; alluminum nitride; resonator; oven controlled micro electromechanical oscillator (OCMO); oven controlled crystal oscillator (OCXO); turn over temperature
Citation Formats
Wojciechowski, Kenneth E., and Olsson, Roy H. A fully integrated oven controlled microelectromechanical oscillator – Part II. Characterization and measurement. United States: N. p., 2015.
Web. doi:10.1109/JMEMS.2015.2441045.
Wojciechowski, Kenneth E., & Olsson, Roy H. A fully integrated oven controlled microelectromechanical oscillator – Part II. Characterization and measurement. United States. https://doi.org/10.1109/JMEMS.2015.2441045
Wojciechowski, Kenneth E., and Olsson, Roy H. 2015.
"A fully integrated oven controlled microelectromechanical oscillator – Part II. Characterization and measurement". United States. https://doi.org/10.1109/JMEMS.2015.2441045. https://www.osti.gov/servlets/purl/1236202.
@article{osti_1236202,
title = {A fully integrated oven controlled microelectromechanical oscillator – Part II. Characterization and measurement},
author = {Wojciechowski, Kenneth E. and Olsson, Roy H.},
abstractNote = {Our paper reports the measurement and characterization of a fully integrated oven controlled microelectromechanical oscillator (OCMO). The OCMO takes advantage of high thermal isolation and monolithic integration of both aluminum nitride (AlN) micromechanical resonators and electronic circuitry to thermally stabilize or ovenize all the components that comprise an oscillator. Operation at microscale sizes allows implementation of high thermal resistance platform supports that enable thermal stabilization at very low-power levels when compared with the state-of-the-art oven controlled crystal oscillators. A prototype OCMO has been demonstrated with a measured temperature stability of -1.2 ppb/°C, over the commercial temperature range while using tens of milliwatts of supply power and with a volume of 2.3 mm3 (not including the printed circuit board-based thermal control loop). Additionally, due to its small thermal time constant, the thermal compensation loop can maintain stability during fast thermal transients (>10 °C/min). This new technology has resulted in a new paradigm in terms of power, size, and warm up time for high thermal stability oscillators.},
doi = {10.1109/JMEMS.2015.2441045},
url = {https://www.osti.gov/biblio/1236202},
journal = {Journal of Microelectromechanical Systems},
issn = {1057-7157},
number = 6,
volume = 24,
place = {United States},
year = {Wed Jun 24 00:00:00 EDT 2015},
month = {Wed Jun 24 00:00:00 EDT 2015}
}
Web of Science
Works referencing / citing this record:
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