A Method of Image-Based Aberration Metrology for EUVL Tools
Journal Article
·
· Proceedings of SPIE - The International Society for Optical Engineering
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Materials Sciences Division
- OSTI ID:
- 1229864
- Report Number(s):
- LBNL-176150; ir:176150
- Journal Information:
- Proceedings of SPIE - The International Society for Optical Engineering, Vol. 9422; ISSN 0277-786X
- Publisher:
- SPIE
- Country of Publication:
- United States
- Language:
- English
Similar Records
EUVL resist-based aberration metrology
AN FE-based Image Deformation tool to quantify the metrological performance of stereo-DIC.
EUV actinic imaging tool aerial image evaluation of EUVL embedded phase shift mask performance
Conference
·
Fri Feb 01 00:00:00 EST 2013
·
OSTI ID:1229864
+2 more
AN FE-based Image Deformation tool to quantify the metrological performance of stereo-DIC.
Conference
·
Sun May 01 00:00:00 EDT 2016
·
OSTI ID:1229864
+1 more
EUV actinic imaging tool aerial image evaluation of EUVL embedded phase shift mask performance
Conference
·
Tue Jan 31 00:00:00 EST 2012
·
OSTI ID:1229864