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Title: High numerical aperture multilayer Laue lenses

Abstract

The ever-increasing brightness of synchrotron radiation sources demands improved X-ray optics to utilise their capability for imaging and probing biological cells, nanodevices, and functional matter on the nanometer scale with chemical sensitivity. Here we demonstrate focusing a hard X-ray beam to an 8 nm focus using a volume zone plate (also referred to as a wedged multilayer Laue lens). This lens was constructed using a new deposition technique that enabled the independent control of the angle and thickness of diffracting layers to microradian and nanometer precision, respectively. This ensured that the Bragg condition is satisfied at each point along the lens, leading to a high numerical aperture that is limited only by its extent. We developed a phase-shifting interferometric method based on ptychography to characterise the lens focus. The precision of the fabrication and characterisation demonstrated here provides the path to efficient X-ray optics for imaging at 1 nm resolution.

Authors:
 [1];  [1];  [2];  [3];  [1];  [1];  [1];  [1];  [1];  [1];  [4];  [1];  [5];  [6];  [1]
  1. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany)
  2. Univ. of Bialystok (Poland)
  3. SLAC National Accelerator Lab., Menlo Park, CA (United States)
  4. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany); Univ. of Hamburg (Germany).
  5. Eurpean XFEL GmbH, Hamburg (Germany)
  6. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany); Centre for Ultrafast Umaging, Hamburg (Germany); Univ. of Hamburg (Germany).
Publication Date:
Research Org.:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1208858
Grant/Contract Number:  
AC03-76SF00515
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Scientific Reports
Additional Journal Information:
Journal Volume: 5; Journal ID: ISSN 2045-2322
Publisher:
Nature Publishing Group
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Morgan, Andrew J., Prasciolu, Mauro, Andrejczuk, Andrzej, Krzywinski, Jacek, Meents, Alke, Pennicard, David, Graafsma, Heinz, Barty, Anton, Bean, Richard J., Barthelmess, Miriam, Oberthuer, Dominik, Yefanov, Oleksandr, Aquila, Andrew, Chapman, Henry N., and Bajt, Saša. High numerical aperture multilayer Laue lenses. United States: N. p., 2015. Web. doi:10.1038/srep09892.
Morgan, Andrew J., Prasciolu, Mauro, Andrejczuk, Andrzej, Krzywinski, Jacek, Meents, Alke, Pennicard, David, Graafsma, Heinz, Barty, Anton, Bean, Richard J., Barthelmess, Miriam, Oberthuer, Dominik, Yefanov, Oleksandr, Aquila, Andrew, Chapman, Henry N., & Bajt, Saša. High numerical aperture multilayer Laue lenses. United States. https://doi.org/10.1038/srep09892
Morgan, Andrew J., Prasciolu, Mauro, Andrejczuk, Andrzej, Krzywinski, Jacek, Meents, Alke, Pennicard, David, Graafsma, Heinz, Barty, Anton, Bean, Richard J., Barthelmess, Miriam, Oberthuer, Dominik, Yefanov, Oleksandr, Aquila, Andrew, Chapman, Henry N., and Bajt, Saša. 2015. "High numerical aperture multilayer Laue lenses". United States. https://doi.org/10.1038/srep09892. https://www.osti.gov/servlets/purl/1208858.
@article{osti_1208858,
title = {High numerical aperture multilayer Laue lenses},
author = {Morgan, Andrew J. and Prasciolu, Mauro and Andrejczuk, Andrzej and Krzywinski, Jacek and Meents, Alke and Pennicard, David and Graafsma, Heinz and Barty, Anton and Bean, Richard J. and Barthelmess, Miriam and Oberthuer, Dominik and Yefanov, Oleksandr and Aquila, Andrew and Chapman, Henry N. and Bajt, Saša},
abstractNote = {The ever-increasing brightness of synchrotron radiation sources demands improved X-ray optics to utilise their capability for imaging and probing biological cells, nanodevices, and functional matter on the nanometer scale with chemical sensitivity. Here we demonstrate focusing a hard X-ray beam to an 8 nm focus using a volume zone plate (also referred to as a wedged multilayer Laue lens). This lens was constructed using a new deposition technique that enabled the independent control of the angle and thickness of diffracting layers to microradian and nanometer precision, respectively. This ensured that the Bragg condition is satisfied at each point along the lens, leading to a high numerical aperture that is limited only by its extent. We developed a phase-shifting interferometric method based on ptychography to characterise the lens focus. The precision of the fabrication and characterisation demonstrated here provides the path to efficient X-ray optics for imaging at 1 nm resolution.},
doi = {10.1038/srep09892},
url = {https://www.osti.gov/biblio/1208858}, journal = {Scientific Reports},
issn = {2045-2322},
number = ,
volume = 5,
place = {United States},
year = {Mon Jun 01 00:00:00 EDT 2015},
month = {Mon Jun 01 00:00:00 EDT 2015}
}

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Cited by: 74 works
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Works referenced in this record:

A compound refractive lens for focusing high-energy X-rays
journal, November 1996


Breaking the 10 nm barrier in hard-X-ray focusing
journal, November 2009


Real space soft x-ray imaging at 10 nm spatial resolution
journal, January 2012


Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture
journal, September 2007


Synchrotron x-ray study of multilayers in Laue geometry
conference, November 2004

  • Kang, Hyon Chol; Stephenson, Gregory B.; Liu, Chian
  • Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
  • https://doi.org/10.1117/12.560173

Multilayer Laue lenses as high-resolution x-ray optics
conference, November 2004

  • Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan
  • Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
  • https://doi.org/10.1117/12.560046

High-efficiency diffractive x-ray optics from sectioned multilayers
journal, April 2005


Hard x-ray nanofocusing by multilayer Laue lenses
journal, June 2014


Low‐Loss Reflection Coatings Using Absorbing Materials
journal, May 1972


Circular multilayer zone plate for high-energy x-ray nano-imaging
journal, January 2012


Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
journal, January 2013


Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope
journal, March 2013


11 nm hard X-ray focus from a large-aperture multilayer Laue lens
journal, December 2013


Characterization of a multilayer Laue lens with imperfections
journal, November 2007

  • Yan, H.; Kang, H. C.; Maser, J.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 582, Issue 1
  • https://doi.org/10.1016/j.nima.2007.08.080

Fabrication of wedged multilayer Laue lenses
journal, January 2015


Transmission microscopy without lenses for objects of unlimited size
journal, February 2007


Probe retrieval in ptychographic coherent diffractive imaging
journal, March 2009


The theory of super-resolution electron microscopy via Wigner-distribution deconvolution
journal, June 1992

  • Rodenburg, J. M.; Bates, R. H. T.
  • Philosophical Transactions of the Royal Society of London. Series A: Physical and Engineering Sciences, Vol. 339, Issue 1655, p. 521-553
  • https://doi.org/10.1098/rsta.1992.0050

Simultaneous reconstruction of object and aperture functions from multiple far-field intensity measurements
journal, January 1993


Phase-retrieval X-ray microscopy by Wigner-distribution deconvolution
journal, December 1996


Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers
journal, July 2001


High-efficiency x-ray gratings with asymmetric-cut multilayers
journal, January 2012


Analysis of tilted multilayer Laue lens with stochastic layer thickness error
journal, August 2014


Investigating the interaction of x-ray free electron laser radiation with grating structure
journal, January 2012


On beam propagation methods for modelling in integrated optics
journal, January 1997


High-Resolution Scanning X-ray Diffraction Microscopy
journal, July 2008


W/SiC X-ray multilayers optimized for use above 100 keV
conference, March 2003


Diffraction, Fourier Optics and Imaging
book, May 2006


Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
text, January 2013


A compound refractive lens for focusing high-energy X-rays
journal, November 1996


W/SiC x-ray multilayers optimized for use above 100 keV
journal, January 2003


One-dimensional hard x-ray field retrieval using a moveable structure
journal, January 2010


Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
text, January 2013


Works referencing / citing this record:

7 nm Spatial Resolution in Soft X-ray Microscopy
journal, August 2018


X-ray focusing with efficient high-NA multilayer Laue lenses
journal, November 2017


Interlaced zone plate optics for hard X-ray imaging in the 10 nm range
journal, March 2017


50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors
journal, April 2017


One dimensional focusing with high numerical aperture multilayer Laue lens
conference, January 2016

  • Bajt, Saša; Prasciolu, Mauro; Morgan, Andrew J.
  • XRM 2014: Proceedings of the 12th International Conference on X-Ray Microscopy, AIP Conference Proceedings
  • https://doi.org/10.1063/1.4937543

Development and characterization of monolithic multilayer Laue lens nanofocusing optics
journal, June 2016


Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses
journal, March 2017


Multilayer Laue Lens: A Brief History and Current Status
journal, July 2016


Terahertz wave manipulation based on multi-bit coding artificial electromagnetic surfaces
journal, April 2018


High resolution tip-tilt positioning system for a next generation MLL-based x-ray microscope
journal, November 2017


Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science
journal, March 2018


Simulating and optimizing compound refractive lens-based X-ray microscopes
journal, February 2017


Translative lens-based full-field coherent X-ray imaging
journal, January 2020


Aberration correction for hard x-ray focusing at the nanoscale
conference, September 2017


Ptychographic Nano-Analytical Microscope (PtyNAMi) at PETRA III: signal-to-background optimization for imaging with high sensitivity
conference, September 2019


Zone Plates for X-Ray Focusing (Review)
journal, November 2017


Numerical study of Bragg CDI on thick polycrystalline specimens
journal, January 2018


Dose efficient Compton X-ray microscopy
journal, January 2018


Multi-slice ptychography with large numerical aperture multilayer Laue lenses
journal, January 2018


Multiscale 3D characterization with dark-field x-ray microscopy
journal, June 2016


On the Properties of WC/SiC Multilayers
text, January 2018


Multilayer Laue lenses at high x-ray energies: Performance and applications
text, January 2019


Ptychographic characterization of polymer compound refractive lenses manufactured by additive technology
text, January 2019


Ptychographic X-ray speckle tracking
text, January 2020


Ptychographic X-ray speckle tracking
journal, May 2020


Multilayer Laue lenses at high X-ray energies: performance and applications
journal, January 2019


One dimensional focusing with high numerical aperture multilayer Laue lens
text, January 2016


X-ray focusing with efficient high-NA multilayer Laue lenses
text, January 2017


Aberration correction for hard x-ray focusing at the nanoscale
text, January 2017


PETRA IV: the ultralow-emittance source project at DESY
text, January 2018


On the Properties of WC/SiC Multilayers
journal, April 2018


Ptychographic Nano-Analytical Microscope (PtyNAMi) at PETRA III: signal-to-background optimization for imaging with high sensitivity
text, January 2019


Perfect X-ray focusing via fitting corrective glasses to aberrated optics
journal, March 2017


Ptychographic X-ray speckle tracking
text, January 2020


Dose efficient Compton X-ray microscopy
text, January 2018


Ptychographic X-ray Speckle Tracking
preprint, January 2020


Ellipsoidal mirror for two-dimensional 100-nm focusing in hard X-ray region
journal, November 2017


50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors
journal, April 2017


Stimulated scintillation emission depletion X-ray imaging
journal, January 2017


X-ray focusing with efficient high-NA multilayer Laue lenses
text, January 2017