Electrical latching of microelectromechanical devices
Patent
·
OSTI ID:1175117
Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.
- Research Organization:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation
- Patent Number(s):
- 6,813,060
- Application Number:
- 10/316,172
- OSTI ID:
- 1175117
- Country of Publication:
- United States
- Language:
- English
Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
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conference | November 2002 |
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