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Title: Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates

Patent ·
OSTI ID:1169084
; ; ;

The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46471
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,946,683
Application Number:
12/996,924
OSTI ID:
1169084
Country of Publication:
United States
Language:
English

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Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films journal September 2004
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Ultrahigh-Density Nanowire Lattices and Circuits journal March 2003
A printable form of silicon for high performance thin film transistors on plastic substrates journal June 2004
High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics journal December 2004
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems journal April 2007
Printing meets lithography: Soft approaches to high-resolution patterning journal September 2001
Colloidal nanocrystal heterostructures with linear and branched topology journal July 2004
Plastic Electronics and Their Packaging Technologies journal April 2003
Emerging Methods for Micro- and Nanofabrication journal July 2001
Electrically Induced Optical Emission from a Carbon Nanotube FET journal May 2003
AlGaN/GaN HEMTs-an overview of device operation and applications journal June 2002
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Ink-Jet Printing of Binders for Ceramic Components journal April 2002
Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants journal October 2003
A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics journal January 1978
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes journal January 1995
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
On the aging of oxygen plasma-treated polydimethylsiloxane surfaces journal June 1990
Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes journal March 2005
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Nanotubes of the disulfides of groups 4 and 5 metals journal January 2002
Amorphous silicon technology for large area digital X-ray and optical imaging journal April 2002
Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors journal August 2004
Luminescence Photophysics in Semiconductor Nanocrystals journal November 1998
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors journal November 2004
Macroelectronic applications of carbon nanotube networks journal October 2004
Nerve agent detection using networks of single-walled carbon nanotubes journal November 2003
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Improved Pattern Transfer in Soft Lithography Using Composite Stamps journal June 2002
High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors journal March 2004
Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors journal August 2005
High-Performance, Flexible Polymer Light-Emitting Diodes Fabricated by a Continuous Polymer Coating Process journal June 2002
Nanobelts of Semiconducting Oxides journal March 2001
Sharp exciton emission from single InAs quantum dots in GaAs nanowires journal September 2003
Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices journal September 2000
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997
Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates journal June 1998
GaN: Processing, defects, and devices journal July 1999
Limits of Performance Gain of Aligned CNT Over Randomized Network: Theoretical Predictions and Experimental Validation journal July 2007
Performance Assessment of Subpercolating Nanobundle Network Thin-Film Transistors by an Analytical Model journal April 2007
Performance assessment of sub-percolating nanobundle network transistors by an analytical model conference January 2005
Theory and practice of “Striping” for improved ON/OFF Ratio in carbon nanonet thin film transistors journal February 2009
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
Ultrathin epitaxial germanium on crystalline oxide metal-oxide-semiconductor-field-effect transistors journal May 2005
Stars and stripes. Nanoscale misfit dislocation patterns on surfaces journal January 2002
From Micro- to Nanofabrication with Soft Materials journal November 2000
Drain voltage scaling in carbon nanotube transistors journal September 2003
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants journal January 1989
Nanotube electronics: Large-scale assembly of carbon nanotubes journal September 2003
High-power laser diodes based on InGaAsP alloys journal June 1994
Macroelectronics: Perspectives on Technology and Applications journal July 2005
Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design journal February 1998
All-Inorganic Field Effect Transistors Fabricated by Printing journal October 1999
Large-scale purification of single-wall carbon nanotubes: process, product, and characterization journal July 1998
Looking at Rubber Adhesion journal March 1979
GaAs Readied for High-Speed Microcircuits journal January 1983
Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field journal May 1997
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68 https://doi.org/10.1116/1.589836
journal June 1998
Quantifying distortions in soft lithography
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97 https://doi.org/10.1116/1.589841
journal June 1998
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Printing Process Suitable for Reel-to-Reel Production of High-Performance Organic Transistors and Circuits journal June 1999
Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping journal March 2000
Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks journal April 2001
Printed plastic electronics and paperlike displays journal August 2002
Rubber Stamping for Plastic Electronics and Fiber Optics journal July 2001
Toward Paperlike Displays journal February 2001
High Performance Electrolyte Gated Carbon Nanotube Transistors journal August 2002
Universal description of channel conductivity for nanotube and nanowire transistors journal August 2003
Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap journal June 2003
Semiconductor nanowires for novel one-dimensional devices journal March 2004
Nature of multilayer steps on the {100} cleavage planes of MgO single crystals journal July 1997
Morphology of nanostructured materials journal January 2002
Low-Temperature Materials and Thin Film Transistors for Flexible Electronics journal August 2005
Structures of quartz (100)- and (101)-water interfaces determined by x-ray reflectivity and atomic force microscopy of natural growth surfaces journal September 2002
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives journal July 1998
Percolation and conductivity: A computer study. II journal August 1974
High-Current Nanotube Transistors journal May 2004
Bending experiment on pentacene field-effect transistors on plastic films journal February 2005
A large-area wireless power-transmission sheet using printed organic transistors and plastic MEMS switches journal April 2007
Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon journal January 2002
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Holographic photonic crystals with diamond symmetry journal November 2003
Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates journal February 2002
Formation and characterization of silicon films on flexible polymer substrates journal April 2005
Insights on Charge Transfer Doping and Intrinsic Phonon Line Shape of Carbon Nanotubes by Simple Polymer Adsorption journal June 2006
Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal October 2004
Direct, Mask- and Solvent-Free Printing of Molecular Organic Semiconductors journal September 2004
Axisymmetric adhesion tests of soft materials journal April 1998
An analytical back-gate bias effect model for ultrathin SOI CMOS devices journal April 1993
Progress in Plastic Electronics Devices journal August 2006
Inkjet Printing of Functional Materials journal November 2003
High-Resolution Inkjet Printing of All-Polymer Transistor Circuits journal December 2000
Device Physics of Solution-Processed Organic Field-Effect Transistors journal October 2005
Colloidal Inks for Directed Assembly of 3-D Periodic Structures journal July 2002
Electric-field assisted assembly and alignment of metallic nanowires journal August 2000
Random networks of carbon nanotubes as an electronic material journal March 2003
High-mobility carbon-nanotube thin-film transistors on a polymeric substrate journal January 2005
Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes journal August 2005
Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners journal November 2005
A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications journal June 2004
Formation of Pb/63Sn solder bumps using a solder droplet jetting method journal July 2005
A buckling-based metrology for measuring the elastic moduli of polymeric thin films journal July 2004
Nanotube Optoelectronic Memory Devices journal September 2004
Understanding the Nature of the DNA-Assisted Separation of Single-Walled Carbon Nanotubes Using Fluorescence and Raman Spectroscopy journal April 2004
Lattice-Oriented Growth of Single-Walled Carbon Nanotubes journal July 2000
A scalable CVD method for the synthesis of single-walled carbon nanotubes with high catalyst productivity journal May 2000
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates journal October 2004
Advances in organic field-effect transistors journal November 2004
Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates journal August 2005
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors journal January 2005
Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals journal March 2004
Mechanics of rollable and foldable film-on-foil electronics journal February 1999
Polymers and carbon nanotubes—dimensionality, interactions and nanotechnology journal September 2005
Hydrogen storage in C70 encapsulated single-walled carbon nanotube journal April 2003
Magnetic trapping and self-assembly of multicomponent nanowires journal May 2002
One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise journal April 2005
Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy journal September 2003
Anodization and Microcontact Printing on Electroless Silver: Solution-Based Fabrication Procedures for Low-Voltage Electronic Systems with Organic Active Components journal July 2000
Crystalline Ropes of Metallic Carbon Nanotubes journal July 1996
Photonic Band Gap Architectures for Holographic Lithography journal January 2004
Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores journal June 2003
Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth journal December 1995
Low-Temperature Polycrystalline Silicon Thin-Film Transist or Technologies for System-on-Glass Displays journal November 2002
Porous silica via colloidal crystallization journal October 1997
Molecular control over Au/GaAs diodes journal March 2000
Theory of the field-effect mobility in amorphous organic transistors journal May 1998
On-chip natural assembly of silicon photonic bandgap crystals journal November 2001
Cheap and cheerful circuits journal September 2000
Silicon for thin-film transistors journal April 2003
Electronic skin: architecture and components journal November 2004
A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions journal December 2003
Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses journal August 2005
A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell journal January 2004
Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems journal September 2003
Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications journal January 2002
Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes journal May 2002
Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate journal January 2004
Amorphous silicon crystallization and polysilicon thin film transistors on SiO2 passivated steel foil substrates journal May 2001
Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric journal June 2001
Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy journal December 2002
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires journal October 2003
Soft Lithography journal August 1998
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications journal March 2003
High-mobility thin-film transistors based on aligned carbon nanotubes journal July 2003
Mesoporous silica with micrometer-scale designs journal January 1997
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689 https://doi.org/10.1116/1.591259
journal April 2000
Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser journal June 2002
The Chemistry and Physics of Semiconductor Nanowires journal February 2005
Terraces and ledges on (001) spinel surfaces journal July 2002
High-Field Electrical Transport in Single-Wall Carbon Nanotubes journal March 2000
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates journal June 1994
A Soft Lithography Approach to the Fabrication of Nanostructures of Single Crystalline Silicon with Well-Defined Dimensions and Shapes journal October 2000
Colloidal nanocrystal synthesis and the organic–inorganic interface journal September 2005
Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics journal July 2005
Solution–Liquid–Solid Growth of Soluble GaAs Nanowires journal March 2003
Two-versus three-dimensional quantum confinement in indium phosphide wires and dots journal July 2003
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
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journal August 2004
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps journal February 2003
Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing journal September 2003
Electric-field-directed growth of aligned single-walled carbon nanotubes journal November 2001
CVD synthesis and purification of single-walled carbon nanotubes on aerogel-supported catalyst journal March 2002
Shape-and-solder-directed self-assembly to package semiconductor device segments journal October 2004
An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication journal May 2002
p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks journal October 2004
Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors journal September 2005
High contrast organic light-emitting devices with improved electrical characteristics journal June 2006
Flexible substrate micro-crystalline silicon and gated amorphous silicon strain sensors journal February 2006
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates journal March 2005
Variation in the effective richardson constant of metal—GaAs and Metal—InP contacts due to the effect of processing parameters journal November 1993
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays journal July 2005
Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors journal October 1999
Charge Pumping in Carbon Nanotubes journal December 2005
Bendable single crystal silicon thin film transistors formed by printing on plastic substrates journal February 2005
Intermetallic formation in gold-aluminum systems journal October 1970
Aluminum metallization—Advantages and limitations for integrated circuit applications journal January 1969
Ambipolar Pentacene Field-Effect Transistors and Inverters journal February 2000
Organic field-effect transistors with bending radius down to 1 mm journal January 2004
Microscopic patterning of orientated mesoscopic silica through guided growth journal December 1997

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Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates patent February 2015

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