Recovering effective amplitude and phase roughness of EUV masks
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1164379
- Report Number(s):
- LBNL-6514E
- Journal Information:
- Proc. SPIE, Vol. 8880; Related Information: Journal Publication Date: Sept. 2013
- Country of Publication:
- United States
- Language:
- English
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