Sidewall Roughness Effects on SOI MEMS Fracture Strength.

Conference · Sun Jun 01 00:00:00 EDT 2014

OSTI ID:1146894

Buchheit, Thomas Edward; Phinney, Leslie M.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1146894
• Report Number(s): SAND2014-4696C; 520465
• Resource Relation: Conference: Proposed for presentation at the SEM 2014 Conference and Exposition held June 2-5, 2014 in Geenville, SC.
• Country of Publication: United States
• Language: English