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Title: High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.

Abstract

Abstract not provided.

Authors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1141155
Report Number(s):
SAND2014-2351C
Journal ID: ISSN 2380--4491; 505921
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Journal Volume: 2014; Journal Issue: HITEC; Conference: Proposed for presentation at the International Conference on High Temperature Electronics held May 13-15, 2014 in Albuquerque, NM.
Country of Publication:
United States
Language:
English

Citation Formats

Griffin, Benjamin, Habermehl, Scott D., and Clews, Peggy J. High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.. United States: N. p., 2014. Web. doi:10.4071/HITEC-TA24.
Griffin, Benjamin, Habermehl, Scott D., & Clews, Peggy J. High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.. United States. https://doi.org/10.4071/HITEC-TA24
Griffin, Benjamin, Habermehl, Scott D., and Clews, Peggy J. 2014. "High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.". United States. https://doi.org/10.4071/HITEC-TA24. https://www.osti.gov/servlets/purl/1141155.
@article{osti_1141155,
title = {High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.},
author = {Griffin, Benjamin and Habermehl, Scott D. and Clews, Peggy J.},
abstractNote = {Abstract not provided.},
doi = {10.4071/HITEC-TA24},
url = {https://www.osti.gov/biblio/1141155}, journal = {},
issn = {2380--4491},
number = HITEC,
volume = 2014,
place = {United States},
year = {Sat Mar 01 00:00:00 EST 2014},
month = {Sat Mar 01 00:00:00 EST 2014}
}

Conference:
Other availability
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