High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.
Abstract
Abstract not provided.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1141155
- Report Number(s):
- SAND2014-2351C
Journal ID: ISSN 2380--4491; 505921
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Journal Volume: 2014; Journal Issue: HITEC; Conference: Proposed for presentation at the International Conference on High Temperature Electronics held May 13-15, 2014 in Albuquerque, NM.
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Griffin, Benjamin, Habermehl, Scott D., and Clews, Peggy J. High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.. United States: N. p., 2014.
Web. doi:10.4071/HITEC-TA24.
Griffin, Benjamin, Habermehl, Scott D., & Clews, Peggy J. High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.. United States. https://doi.org/10.4071/HITEC-TA24
Griffin, Benjamin, Habermehl, Scott D., and Clews, Peggy J. 2014.
"High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.". United States. https://doi.org/10.4071/HITEC-TA24. https://www.osti.gov/servlets/purl/1141155.
@article{osti_1141155,
title = {High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.},
author = {Griffin, Benjamin and Habermehl, Scott D. and Clews, Peggy J.},
abstractNote = {Abstract not provided.},
doi = {10.4071/HITEC-TA24},
url = {https://www.osti.gov/biblio/1141155},
journal = {},
issn = {2380--4491},
number = HITEC,
volume = 2014,
place = {United States},
year = {Sat Mar 01 00:00:00 EST 2014},
month = {Sat Mar 01 00:00:00 EST 2014}
}
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