Direct chemical vapor deposition of graphene on dielectric surfaces
Abstract
A substrate is provided that has a metallic layer on a substrate surface of a substrate. A film made of a two dimensional (2-D) material, such as graphene, is deposited on a metallic surface of the metallic layer. The metallic layer is dewet and/or removed to provide the film on the substrate surface.
- Inventors:
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1130059
- Patent Number(s):
- 8,709,881
- Application Number:
- 13/098,929
- Assignee:
- The Regents of the University of California (Oakland, CA)
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 May 02
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Zhang, Yuegang, and Ismach, Ariel. Direct chemical vapor deposition of graphene on dielectric surfaces. United States: N. p., 2014.
Web.
Zhang, Yuegang, & Ismach, Ariel. Direct chemical vapor deposition of graphene on dielectric surfaces. United States.
Zhang, Yuegang, and Ismach, Ariel. 2014.
"Direct chemical vapor deposition of graphene on dielectric surfaces". United States. https://www.osti.gov/servlets/purl/1130059.
@article{osti_1130059,
title = {Direct chemical vapor deposition of graphene on dielectric surfaces},
author = {Zhang, Yuegang and Ismach, Ariel},
abstractNote = {A substrate is provided that has a metallic layer on a substrate surface of a substrate. A film made of a two dimensional (2-D) material, such as graphene, is deposited on a metallic surface of the metallic layer. The metallic layer is dewet and/or removed to provide the film on the substrate surface.},
doi = {},
url = {https://www.osti.gov/biblio/1130059},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 29 00:00:00 EDT 2014},
month = {Tue Apr 29 00:00:00 EDT 2014}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Method for the glow-discharge-activated reactive deposition of electrically conductive material from a gaseous phase
patent, December 1987
- Gartner, Georg; Janiel, Peter A.; Lydtin, Hans
- US Patent Document 4,713,259
Graphene Sheet and Method of Preparing the Same
patent-application, April 2009
- Choi, Jae-young; Shin, Hyeon-Jin; Yoon, Seon-mi
- US Patent Application 12/169114; 20090110627
Transfer-Free Batch Fabrication of Single Layer Graphene Devices
patent-application, July 2012
- Park, Jiwoong; Ruiz-Vargas, Carlos; Levendorf, Mark Philip
- US Patent Application 13/384663; 20120168724
The rise of graphene
journal, March 2007
- Geim, A. K.; Novoselov, K. S.
- Nature Materials, Vol. 6, Issue 3, p. 183-191
Ultrathin Epitaxial Graphite: 2D Electron Gas Properties and a Route toward Graphene-based Nanoelectronics
journal, December 2004
- Berger, Claire; Song, Zhimin; Li, Tianbo
- The Journal of Physical Chemistry B, Vol. 108, Issue 52, p. 19912-19916
Graphene-based composite materials
journal, July 2006
- Stankovich, Sasha; Dikin, Dmitriy A.; Dommett, Geoffrey H. B.
- Nature, Vol. 442, Issue 7100, p. 282-286
Electric Field Effect in Atomically Thin Carbon Films
journal, October 2004
- Novoselov, K. S.
- Science, Vol. 306, Issue 5696, p. 666-669
Experimental observation of the quantum Hall effect and Berry's phase in graphene
journal, November 2005
- Zhang, Yuanbo; Tan, Yan-Wen; Stormer, Horst L.
- Nature, Vol. 438, Issue 7065, p. 201-204
Detection of individual gas molecules adsorbed on graphene
journal, July 2007
- Schedin, F.; Geim, A. K.; Morozov, S. V.
- Nature Materials, Vol. 6, Issue 9, p. 652-655
Chemically Derived, Ultrasmooth Graphene Nanoribbon Semiconductors
journal, February 2008
- Li, Xiaolin; Wang, Xinran; Zhang, Li
- Science, Vol. 319, Issue 5867, p. 1229-1232
Energy Band-Gap Engineering of Graphene Nanoribbons
journal, May 2007
- Han, Melinda Y.; Özyilmaz, Barbaros; Zhang, Yuanbo
- Physical Review Letters, Vol. 98, Issue 20
Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide
journal, February 2009
- Emtsev, Konstantin V.; Bostwick, Aaron; Horn, Karsten
- Nature Materials, Vol. 8, Issue 3
High-throughput solution processing of large-scale graphene
journal, November 2008
- Tung, Vincent C.; Allen, Matthew J.; Yang, Yang
- Nature Nanotechnology, Vol. 4, Issue 1
High-yield production of graphene by liquid-phase exfoliation of graphite
journal, August 2008
- Hernandez, Yenny; Nicolosi, Valeria; Lotya, Mustafa
- Nature Nanotechnology, Vol. 3, Issue 9, p. 563-568
Processable aqueous dispersions of graphene nanosheets
journal, January 2008
- Li, Dan; Müller, Marc B.; Gilje, Scott
- Nature Nanotechnology, Vol. 3, Issue 2
Preparation and characterization of graphene oxide paper
journal, July 2007
- Dikin, Dmitriy A.; Stankovich, Sasha; Zimney, Eric J.
- Nature, Vol. 448, Issue 7152, p. 457-460
Intercalation of silver atoms under a graphite monolayer on Ni(111)
journal, July 2004
- Starodubov, A. G.; Medvetskii, M. A.; Shikin, A. M.
- Physics of the Solid State, Vol. 46, Issue 7
Structural Coherency of Graphene on Ir(111)
journal, February 2008
- Coraux, Johann; N‘Diaye, Alpha T.; Busse, Carsten
- Nano Letters, Vol. 8, Issue 2
Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition
journal, January 2009
- Reina, Alfonso; Jia, Xiaoting; Ho, John
- Nano Letters, Vol. 9, Issue 1
Large-scale pattern growth of graphene films for stretchable transparent electrodes
journal, January 2009
- Kim, Keun Soo; Zhao, Yue; Jang, Houk
- Nature, Vol. 457, Issue 7230
Transfer-Free Batch Fabrication of Single Layer Graphene Transistors
journal, December 2009
- Levendorf, Mark P.; Ruiz-Vargas, Carlos S.; Garg, Shivank
- Nano Letters, Vol. 9, Issue 12
Synthesis of Graphene on Silicon Dioxide by a Solid Carbon Source
journal, January 2010
- Hofrichter, Jens; Szafranek, Bartholomäus N.; Otto, Martin
- Nano Letters, Vol. 10, Issue 1
Studying disorder in graphite-based systems by Raman spectroscopy
journal, January 2007
- Pimenta, M. A.; Dresselhaus, G.; Dresselhaus, M. S.
- Phys. Chem. Chem. Phys., Vol. 9, Issue 11
Raman spectroscopy of graphene and graphite: Disorder, electron–phonon coupling, doping and nonadiabatic effects
journal, July 2007
- Ferrari, Andrea C.
- Solid State Communications, Vol. 143, Issue 1-2, p. 47-57
Raman Spectra of Epitaxial Graphene on SiC and of Epitaxial Graphene Transferred to SiO 2
journal, December 2008
- Lee, Dong Su; Riedl, Christian; Krauss, Benjamin
- Nano Letters, Vol. 8, Issue 12
Measuring the degree of stacking order in graphite by Raman spectroscopy
journal, February 2008
- Cançado, L. G.; Takai, K.; Enoki, T.
- Carbon, Vol. 46, Issue 2, p. 272-275
Perspectives on Carbon Nanotubes and Graphene Raman Spectroscopy
journal, March 2010
- Dresselhaus, Mildred S.; Jorio, Ado; Hofmann, Mario
- Nano Letters, Vol. 10, Issue 3
Interpretation of Raman spectra of disordered and amorphous carbon
journal, May 2000
- Ferrari, A. C.; Robertson, J.
- Physical Review B, Vol. 61, Issue 20, p. 14095-14107
Characterization of Graphite Fiber Surfaces with Raman Spectroscopy
journal, October 1970
- Tuinstra, F.; Koenig, J. L.
- Journal of Composite Materials, Vol. 4, Issue 4
Raman Spectrum of Graphite
journal, August 1970
- Tuinstra, F.; Koenig, J. L.
- The Journal of Chemical Physics, Vol. 53, Issue 3
Origin of dispersive effects of the Raman D band in carbon materials
journal, March 1999
- Matthews, M. J.; Pimenta, M. A.; Dresselhaus, G.
- Physical Review B, Vol. 59, Issue 10
Raman Spectroscopy of Graphene Edges
journal, April 2009
- Casiraghi, C.; Hartschuh, A.; Qian, H.
- Nano Letters, Vol. 9, Issue 4
Monitoring dopants by Raman scattering in an electrochemically top-gated graphene transistor
journal, March 2008
- Das, A.; Pisana, S.; Chakraborty, B.
- Nature Nanotechnology, Vol. 3, Issue 4
Scanning Tunneling Microscopy Characterization of the Electrical Properties of Wrinkles in Exfoliated Graphene Monolayers
journal, December 2009
- Xu, Ke; Cao, Peigen; Heath, James R.
- Nano Letters, Vol. 9, Issue 12
Enhancement of Chemical Activity in Corrugated Graphene
journal, July 2009
- Boukhvalov, Danil W.; Katsnelson, Mikhail I.
- The Journal of Physical Chemistry C, Vol. 113, Issue 32
Control of Graphene's Properties by Reversible Hydrogenation: Evidence for Graphane
journal, January 2009
- Elias, D. C.; Nair, R. R.; Mohiuddin, T. M. G.
- Science, Vol. 323, Issue 5914
Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces
journal, May 2010
- Ismach, Ariel; Druzgalski, Clara; Penwell, Samuel
- Nano Letters, Vol. 10, Issue 5
The growth and morphology of epitaxial multilayer graphene
journal, July 2008
- Hass, J.; de Heer, W. A.; Conrad, E. H.
- Journal of Physics: Condensed Matter, Vol. 20, Issue 32
Room-Temperature Quantum Hall Effect in Graphene
journal, March 2007
- Novoselov, K. S.; Jiang, Z.; Zhang, Y.
- Science, Vol. 315, Issue 5817
Periodically Rippled Graphene: Growth and Spatially Resolved Electronic Structure
journal, February 2008
- Vázquez de Parga, A. L.; Calleja, F.; Borca, B.
- Physical Review Letters, Vol. 100, Issue 5
Growth of graphene on Ir(111)
journal, February 2009
- T. N'Diaye, Alpha; Engler, Martin; Busse, Carsten
- New Journal of Physics, Vol. 11, Issue 2
Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils
journal, May 2009
- Li, X.; Cai, W.; An, J.
- Science, Vol. 324, Issue 5932, p. 1312-1314
Raman Spectrum of Graphene and Graphene Layers
journal, October 2006
- Ferrari, A. C.; Meyer, J. C.; Scardaci, V.
- Physical Review Letters, Vol. 97, Issue 18, Article No. 187401
Raman spectroscopy in graphene
journal, April 2009
- Malard, L. M.; Pimenta, M. A.; Dresselhaus, G.
- Physics Reports, Vol. 473, Issue 5-6, p. 51-87
Few-layer graphene on SiC, pyrolitic graphite, and graphene: A Raman scattering study
journal, January 2008
- Faugeras, C.; Nerrière, A.; Potemski, M.
- Applied Physics Letters, Vol. 92, Issue 1
Why Multilayer Graphene on Behaves Like a Single Sheet of Graphene
journal, March 2008
- Hass, J.; Varchon, F.; Millán-Otoya, J. E.
- Physical Review Letters, Vol. 100, Issue 12
Uniaxial strain in graphene by Raman spectroscopy: peak splitting, Grüneisen parameters, and sample orientation
journal, May 2009
- Mohiuddin, T. M. G.; Lombardo, A.; Nair, R. R.
- Physical Review B, Vol. 79, Issue 20
Raman fingerprint of charged impurities in graphene
journal, December 2007
- Casiraghi, C.; Pisana, S.; Novoselov, K. S.
- Applied Physics Letters, Vol. 91, Issue 23
Electron-electron interactions and doping dependence of the two-phonon Raman intensity in graphene
journal, October 2009
- Basko, D. M.; Piscanec, S.; Ferrari, A. C.
- Physical Review B, Vol. 80, Issue 16
Minimal conductivity of rippled graphene with topological disorder
journal, May 2009
- Cortijo, Alberto; Vozmediano, María A. H.
- Physical Review B, Vol. 79, Issue 18
Anisotropic behaviours of massless Dirac fermions in graphene under periodic potentials
journal, February 2008
- Park, Cheol-Hwan; Yang, Li; Son, Young-Woo
- Nature Physics, Vol. 4, Issue 3
Works referencing / citing this record:
Graphene-transferring member, graphene transferrer, method of transferring graphene, and methods of fabricating graphene device by using the same
patent, December 2015
- Lee, Joo-ho; Lee, Chang-seung; Kim, Yong-sung
- US Patent Document 9,214,559