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Title: Process and structures for fabrication of solar cells with laser ablation steps to form contact holes

Patent ·
OSTI ID:1108939
; ; ; ; ;

Contact holes of solar cells are formed by laser ablation to accomodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thickness.

Research Organization:
SunPower Corporation (San Jose, CA)
Sponsoring Organization:
USDOE
DOE Contract Number:
FC36-07GO17043
Assignee:
SunPower Corporation (San Jose, CA)
Patent Number(s):
8,586,403
Application Number:
13/028,059
OSTI ID:
1108939
Country of Publication:
United States
Language:
English

References (27)

Photovoltaic device patent April 1998
Array substrate patent August 2010
Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions patent-application December 2009
Method for Producing Doped Regions in a Substrate, and Photovoltaic Cell patent-application March 2008
Solar cells and methods for manufacture thereof patent March 1982
Method of fabricating a silicon solar cell patent July 2002
Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use patent-application April 2009
Semiconductor interconnection device with both n- and p-doped regions patent October 1998
Fabrication methods of thin film transistor substrates patent June 2010
Method for manufacturing divided waveplate filter patent August 2010
Methods of fabricating solar-cell structures and resulting solar-cell structures patent-application July 2009
Method of fabricating back surface point contact solar cells patent May 1990
Method of direct Coulomb explosion in laser ablation of semiconductor structures patent July 2010
System and method for eliminating the structure and edge roughness produced during laser ablation of a material patent June 2010
Template for three-dimensional thin-film solar cell manufacturing and methods of use patent March 2012
Array of small contacts for solar cell fabrication patent-application December 2008
Integrated Photodiode for Semiconductor Substrates patent-application April 2010
Laser beam waveguide and laser beam delivery system including same patent March 1996
Template for Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use patent-application July 2008
Ion Implantation Fabrication Process for Thin-Film Crystalline Silicon Solar Cells patent-application December 2010
Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells patent-application June 2009
Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells patent-application September 2009
Electroluminescent laminate with thick film dielectric patent July 1995
Singulating semiconductor wafers to form semiconductor chips patent September 2010
Process and fabrication methods for emitter wrap through back contact solar cells patent-application March 2006
Laser Processing for High-Efficiency Thin Crystalline Silicon Solar Cell Fabrication patent-application February 2012
Preventing harmful polarization of solar cells patent-application September 2006

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14 SOLAR ENERGY