Microfabricated bulk wave acoustic bandgap device
- Albuquerque, NM
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USODE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 7,836,566
- Application Number:
- US Patent Application 12/764,700
- OSTI ID:
- 1014873
- Country of Publication:
- United States
- Language:
- English
Similar Records
Research on micro-sized acoustic bandgap structures.
Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses.