High performance mid-temperature selective absorber based on titanium oxides cermet deposited by direct current reactive sputtering of a single titanium target
This paper reports the design and fabrication of a new double cermet-based low-mid temperature solar selective absorber based on TiOx cermet layers, which were deposited with a single Ti target by varying O2 partial pressure in sputtering chamber as reactive gas. High metal volume fraction cermet 1 and low metal volume fraction cermet 2 were deposited with O2 partial pressure of 0.15 mTorr and 0.25 mTorr, respectively, with direct current power density of 6.58 W cm-2. The complex refractive indices from ellipsometry were used to design solar selective absorber. The reflectance, thermal stability, and morphology were studied in absorbers onmore »