Generalized Ellipsometry Measurements of Crystalline Thin Film and Bulk Tin Oxide
Several bulk and thin‐film crystals of SnO 2 are grown and examined using generalized ellipsometry techniques. The bulk samples are grown using the chemical vapor transport technique and thin films of SnO 2 are grown using the pulsed laser deposition technique. The bulk samples are examined using the two‐modulator generalized ellipsometry microscope (2‐MGEM) at normal incidence and the spectroscopic two‐modulator generalized ellipsometer (2‐MGE). The spectroscopic optical functions of tin oxide are then obtained using the 2‐MGE from 1.46 to 6.2 eV. The material is highly birefringent, and the ordinary bandgap is less than the extraordinary band edge. 2‐MGE measurements are alsomore »