Charging characteritiscs of ultrananocrystalline diamond in RF MEMS capacitive switches.
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- Defense Advanced Research Projects Agency (DARPA)
- DOE Contract Number:
- DE-AC02-06CH11357
- OSTI ID:
- 994055
- Report Number(s):
- ANL/MSD/JA-66397; TRN: US201024%%247
- Resource Relation:
- Conference: IEEE Transactions Meeting; Apr. 19, 2010 - Apr. 22, 2010; New Orleans, LA
- Country of Publication:
- United States
- Language:
- ENGLISH
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