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Title: Adhesive particle shielding

An efficient device for capturing fast moving particles has an adhesive particle shield that includes (i) a mounting panel and (ii) a film that is attached to the mounting panel wherein the outer surface of the film has an adhesive coating disposed thereon to capture particles contacting the outer surface. The shield can be employed to maintain a substantially particle free environment such as in photolithographic systems having critical surfaces, such as wafers, masks, and optics and in the tools used to make these components, that are sensitive to particle contamination. The shield can be portable to be positioned in hard-to-reach areas of a photolithography machine. The adhesive particle shield can incorporate cooling means to attract particles via the thermophoresis effect.
Authors:
 [1] ;  [2] ;  [3] ;  [4]
  1. Dublin, CA
  2. Albuquerque, NM
  3. Berkeley, CA
  4. Livermore, CA
Publication Date:
OSTI Identifier:
985861
Report Number(s):
7,473,301
US patent application 10/245,218
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Research Org:
National Nuclear Security Agency Service Center
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION