Ultrahigh-Resolution Scanning Transmission Electron Microscopy with Sub-Angstrom-Sized Electron Beams

Journal Article · Sat Jan 01 00:00:00 EST 2005 · Journal of Crystallography Society of Japan

DOI:https://doi.org/10.5940/jcrsj.47.26· OSTI ID:978108

Abe, E. ^[1]; Pennycook, Stephen J ^[2]

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1. University of Tokyo, Tokyo, Japan
2. ORNL

The scanning transmission electron microscope (STEM) with an annular dark-field (ADF) detector provides atomic-resolution incoherent images, whose resolution is dominated, to a good approximation, by the size of convergent electron beams. Improving a spherical aberration of microscope objective lenses has been successful in converging the beam into sub-angstrom scale, promising a remarkably higher resolution for STEM. Here we describe the performance of aberration-corrected 300kV-STEM-the world-best STEM available today. The results clearly demonstrate that a sub-angstrom resolution has been indeed achieved for not only simple structures but also structurally complex systems (quasicrystals).

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE Office of Science (SC)
• DOE Contract Number: DE-AC05-00OR22725
• OSTI ID: 978108
• Journal Information: Journal of Crystallography Society of Japan, Vol. 47, Issue 1; ISSN 0369--4585
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
ELECTRON BEAMS
GEOMETRICAL ABERRATIONS
SPATIAL RESOLUTION
TRANSMISSION ELECTRON MICROSCOPY
SCANNING ELECTRON MICROSCOPY
PERFORMANCE