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Title: Silicone oil contamination and electrical contact resistance degradation of low-force gold contacts.

Hot-switched low-force gold electrical contact testing was performed using a nanomechanical test apparatus to ascertain the sensitivity of simulated microelectromechanical systems (MEMS) contact to silicone oil contamination. The observed cyclic contact resistance degradation was dependent on both closure rate and noncontact applied voltage. The decomposition of silicone oil from electrical arcing was hypothesized as the degradation mechanism.
Authors:
;
Publication Date:
OSTI Identifier:
951701
Report Number(s):
SAND2006-1028J
TRN: US200913%%14
DOE Contract Number:
AC04-94AL85000
Resource Type:
Journal Article
Resource Relation:
Journal Name: Proposed for publication in the IEEE Journal of Microelectromechanical Systems.
Research Org:
Sandia National Laboratories
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ELECTRIC CONTACTS; GOLD; SILICONES; PERFORMANCE TESTING; MICROELECTRONICS; OILS; ELECTRIC CONDUCTIVITY; DECOMPOSITION; ELECTRIC ARCS