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Title: Sputter deposition of ZnS:Mn/SrS:Ce multilayer stacks for use as white phosphor thin film electroluminscent panels

Sputter deposition of ZnS:Mn/SrS:Ce multilayered broad-band ``white`` emission thin film electroluminescent (TFEL) stacks has been investigated. To date, deposition of these multilayers has been limited to vacuum evaporation techniques and atomic layer epitaxy, both of which require two different substrate temperatures for growth of high quality ZnS and SrS. This repeated thermal cycling during multilayer deposition can induce stress, defects, and interdiffusion with adversely affect EL performance. Sputter deposition of ZnS and SrS produces high quality TFELs for a wider range of substrate temperatures. Both materials can be sputter deposited at a common temperature (300-350{degrees}C) which eliminates the need for thermal cycling and increases manufacturability. Luminance outputs from sputter deposited ZnS and SrS thin films are comparable to those from evaporated films, making sputtering an attractive alternative deposition technique for these materials. We report on the effects of sputter deposition parameters including chamber pressure, substrate temperature, and H2S process gas partial pressure on the resultant composition and morphology of ZnS:Mn and SrS:Ce thin films and multilayers. Their EL performance was evaluated and correlated to composition and morphology.
Authors:
 [1] ; ;  [2]
  1. Sandia National Labs., Albuquerque, NM (United States)
  2. Planar America, Inc. Beaverton, Oregon (United States)
Publication Date:
OSTI Identifier:
93482
Report Number(s):
SAND-95-1496C; CONF-951033-4
ON: DE95015080
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: 27. international technical conference of the Society for the Advancement of Material and Process Engineering (SAMPE): diversity into the next century, Albuquerque, NM (United States), 9-12 Oct 1995; Other Information: PBD: [1995]
Research Org:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
99 MATHEMATICS, COMPUTERS, INFORMATION SCIENCE, MANAGEMENT, LAW, MISCELLANEOUS; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 36 MATERIALS SCIENCE; DISPLAY DEVICES; ZINC SULFIDES; STRONTIUM SULFIDES; PHOSPHORS; THIN FILMS; ELECTROLUMINESCENCE; MANGANESE ADDITIONS; CERIUM ADDITIONS; SPUTTERING; DEPOSITION; PERFORMANCE