Caesium sputter ion source compatible with commercial SIMS instruments.
A simple design for a caesium sputter cluster ion source compatible with commercially available secondary ion mass spectrometers is reported. This source has been tested with the Cameca IMS 4f instrument using the cluster Si{sub n}{sup -} and Cu{sub n}{sup -} ions, and will shortly be retrofitted to the floating low energy ion gun (FLIG) of the type used on the Cameca 4500/4550 quadruple instruments. Our experiments with surface characterization and depth profiling conducted to date demonstrate improvements of analytical capabilities of the SIMS instrument due to the non-additive enhancement of secondary ion emission and shorter ion ranges of polyatomic projectiles compared to atomic ions with the same impact energy.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC); NATO; FOR
- DOE Contract Number:
- DE-AC02-06CH11357
- OSTI ID:
- 927987
- Report Number(s):
- ANL/MSD/JA-55314; ASUSEE; TRN: US0804680
- Journal Information:
- Appl. Surf. Sci., Vol. 252, Issue 9 ; 2006; ISSN 0169-4332
- Country of Publication:
- United States
- Language:
- ENGLISH
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