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Title: Mechanical properties of ion-implanted amorphous silicon.

Authors:
; ;
Publication Date:
OSTI Identifier:
926796
Report Number(s):
SAND2003-2123J
DOE Contract Number:
AC04-94AL85000
Resource Type:
Journal Article
Resource Relation:
Journal Name: Proposed for publication in Journal of Materials Research.
Research Org:
Sandia National Laboratories
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English