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Title: A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15-millimeter travel range

We have designed and tested a new digital signal processor (DSP)-based closed-loop feedback controller for a linear actuator system with sub-angstrom resolution and 15-mm travel range. The linear actuator system consists of a laser Doppler encoder with multiple-reflection optics [1], a high-stiffness weak-link mechanism with high driving sensitivity and stability [2], and a Texas Instruments TMS320C40 DSP-based controller for high-performance closed-loop feedback control. In this paper, we discuss the DSP-based controller design, as well as recent test results yielding step sizes below 50 picometers obtained with the atomic force microprobe setup.
Authors:
; ; ;  [1] ;
  1. (APS)
Publication Date:
OSTI Identifier:
925272
Report Number(s):
ANL/XFD/CP-116780
TRN: US200807%%92
DOE Contract Number:
DE-AC02-06CH11357
Resource Type:
Conference
Resource Relation:
Conference: International Society for Optical Engineering; Jul 31 - Aug 4, 2005; San Diego, CA
Publisher:
Proc. Vol. 5877, edited by A. E. Hatheway, SPIE : New York, pp. 5877OG
Research Org:
Argonne National Laboratory (ANL)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
ENGLISH
Subject:
42 ENGINEERING; ACTUATORS; DESIGN; FEEDBACK; SENSITIVITY; PERFORMANCE TESTING; SIGNAL CONDITIONERS; CONTROL EQUIPMENT