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Title: MEMS inertial sensors with integral rotation means.

The state-of-the-art of inertial micro-sensors (gyroscopes and accelerometers) has advanced to the point where they are displacing the more traditional sensors in many size, power, and/or cost-sensitive applications. A factor limiting the range of application of inertial micro-sensors has been their relatively poor bias stability. The incorporation of an integral sensitive axis rotation capability would enable bias mitigation through proven techniques such as indexing, and foster the use of inertial micro-sensors in more accuracy-sensitive applications. Fabricating the integral rotation mechanism in MEMS technology would minimize the penalties associated with incorporation of this capability, and preserve the inherent advantages of inertial micro-sensors.
Publication Date:
OSTI Identifier:
Report Number(s):
TRN: US200817%%696
DOE Contract Number:
Resource Type:
Technical Report
Research Org:
Sandia National Laboratories
Sponsoring Org:
Country of Publication:
United States
47 OTHER INSTRUMENTATION; ACCELEROMETERS; GYROSCOPES; MITIGATION; ROTATION; STABILITY; Miniature electronic equipment-Design and construction.; Microsensors.; Gyroscopes.; Inertia; Accelerometers.