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Title: Silicon fiber optic sensors

A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
Authors:
 [1] ;  [1] ;  [1]
  1. (Livermore, CA)
Publication Date:
OSTI Identifier:
917190
Report Number(s):
7,277,605
US patent application 11/132,663
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Patent
Research Org:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Org:
United States Department of Energy
Country of Publication:
United States
Language:
English