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Title: MEMS fluidic actuator

The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.
Authors:
 [1] ;  [2] ;  [1] ;  [1] ;  [1]
  1. (Albuquerque, NM)
  2. (Trophy Club, TX)
Publication Date:
OSTI Identifier:
912875
Report Number(s):
7,246,524
US patent application 11/120,843
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org:
United States Department of Energy
Country of Publication:
United States
Language:
English