Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays

Patent · Tue Dec 12 00:00:00 EST 2006

OSTI ID:907972

Garcia, Ernest J ^[1]; Polosky, Marc A ^[2]; Sleefe, Gerard E ^[3]

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1. Albuquerque, NM
2. Tijeras, NM
3. Cedar Crest, NM

A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1 20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 7,148,603
• Application Number: 10/307,216
• OSTI ID: 907972
• Country of Publication: United States
• Language: English

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