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Title: Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use

A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.
Authors:
 [1]
  1. (Pleasanton, CA)
Publication Date:
OSTI Identifier:
874232
Report Number(s):
US 6346030
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Research Org:
SANDIA CORP
Country of Publication:
United States
Language:
English
Subject:
microdevice; interior; cavity; aspect; ratio; surface; features; associated; methods; manufacture; microdevice; interior; cavity; aspect; ratio; features; ultrasmooth; surfaces; associated; method; manufacture; described; liga-produced; shaped; bit; contour; polish; surface; sacrificial; mandrel; contoured; sacrificial; mandrel; subsequently; coated; structural; material; mandrel; removed; produce; microdevices; micrometer-sized; surface; features; sub-micrometer; rms; surface; roughness; smooth surface; associated method; associated method; interior cavity; interior cavity; surface feature /451/