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Title: Position control system for use with micromechanical actuators

A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.
Authors:
 [1] ;  [1]
  1. (Madison, WI)
Publication Date:
OSTI Identifier:
873090
Report Number(s):
US 6087743
DOE Contract Number:
AV-5723
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
position; control; micromechanical; actuators; positioning; adapted; micromechanical; actuators; provides; feedback; control; position; movable; element; actuator; utilizing; sensing; coil; effective; inductance; sensing; coil; changes; position; movable; element; change; frequency; oscillation; variable; oscillator; output; variable; oscillator; compared; phase; detector; reference; oscillator; signal; phase; detector; provides; pulsed; output; pulse; duty; cycle; related; phase; frequency; difference; oscillator; signals; output; phase; detector; provided; drive; coil; applies; magnetic; force; movable; element; balances; force; spring; movable; element; displaced; position; changing; frequency; reference; oscillator; magnetic force; sensing coil; sensing coil; feedback control; duty cycle; movable element; movable element; movable element; movable element; drive coil; position control; provides feedback; micromechanical actuators; micromechanical actuators; oscillator signal; oscillator signal; micromechanical actuator; micromechanical actuator; actuator utilizing; actuators provide /310/318/324/