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Title: Position control system for use with micromechanical actuators

A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.
 [1] ;  [1]
  1. (Madison, WI)
Publication Date:
OSTI Identifier:
Report Number(s):
US 6087743
DOE Contract Number:
Resource Type:
Country of Publication:
United States
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