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Title: Compton backscattered collmated X-ray source

A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.
 [1] ;  [2]
  1. (Woodside, CA)
  2. (Stanford, CA)
Publication Date:
OSTI Identifier:
Report Number(s):
US 6035015
DOE Contract Number:
Resource Type:
Research Org:
Stanford Linear Accelerator Center (SLAC), Menlo Park, CA
Country of Publication:
United States
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