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Title: Compton backscattered collmated X-ray source

A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.
Authors:
 [1] ;  [2]
  1. (Woodside, CA)
  2. (Stanford, CA)
Publication Date:
OSTI Identifier:
872897
Report Number(s):
US 6035015
DOE Contract Number:
AC03-76SF00515
Resource Type:
Patent
Research Org:
Stanford Linear Accelerator Center (SLAC), Menlo Park, CA
Country of Publication:
United States
Language:
English
Subject:
compton; backscattered; collmated; x-ray; source; high-intensity; inexpensive; collimated; x-ray; source; applications; x-ray; lithography; disclosed; intense; pulse; power; laser; stored; high-finesse; resonator; repetitively; collides; nearly; head-on; compton; backscatters; bunched; electron; beam; relatively; energy; circulating; compact; storage; laser; electron; beams; tightly; focused; matched; interaction; region; inside; optical; resonator; laser-electron; interaction; rise; x-rays; desired; wavelength; cools; stabilizes; electrons; intrabeam; scattering; coulomb; repulsion; storage; cooling; provides; compact; intense; bunch; electrons; suitable; applications; particular; sufficient; amount; x-rays; generated; device; excellent; flexible; compton; backscattered; x-ray; cbx; source; throughput; x-ray; lithography; applications; compton backscattered; compton backscattered; desired wavelength; x-ray lithography; x-ray lithography; sufficient amount; x-ray source; x-ray source; electron beam; electron beam; electron beams; power laser; region inside; bunched electron; collimated x-ray; scattered x-ray; coulomb repulsion; interaction region; high-finesse resonator; intense pulse; desired wave /378/