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Title: Micromachined electrostatic vertical actuator

A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.
Authors:
 [1] ;  [2] ;  [3] ;  [4]
  1. (Walnut Creek, CA)
  2. (Santa Cruz, CA)
  3. (Livermore, CA)
  4. (Pleasanton, CA)
Publication Date:
OSTI Identifier:
872600
Report Number(s):
US 5969848
US patent application 08/888000
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Patent
Research Org:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Country of Publication:
United States
Language:
English
Subject:
micromachined; electrostatic; vertical; actuator; micromachined; vertical; actuator; utilizing; levitational; force; electrostatic; comb; drives; provides; vertical; actuation; relatively; linear; actuation; control; readily; combined; parallel; plate; capacitive; position; sensing; position; control; micromachined; electrostatic; vertical; actuator; provides; accurate; movement; sub-micron; micron; ranges; desirable; phase; modulation; instrument; optical; phase; shifting; example; compact; inexpensive; position; controllable; micromirrors; utilizing; electrostatic; vertical; actuator; replace; expensive; difficult-to-maintain; piezoelectric; actuators; thirty; pound; piezoelectric; actuator; corner; cube; reflectors; utilized; phase; shifting; diffraction; interferometer; replaced; micromirror; lens; precise; amplitudes; motion; micromachined; electrostatic; actuation; compact; size; power; consumption; straightforward; sensing; control; options; position sensing; optical phase; electrostatic comb; provides accurate; diffraction interferometer; power consumption; phase shifting; phase shifting; phase shift; phase shift; phase modulation; position control; position control; parallel plate; vertical actuator; vertical actuator; vertical actuator; vertical actuator; provides vertical; shifting diffraction; micron range; vertical actuation; actuator utilizing; corner cube /359/73/250/310/361/