skip to main content

Title: Filtered cathodic arc deposition apparatus and method

A filtered cathodic arc deposition method and apparatus for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.
  1. (24461 W. Blvd. De John, Naperville, IL 60564)
Publication Date:
OSTI Identifier:
Report Number(s):
US 5902462
DOE Contract Number:
Resource Type:
Research Org:
Argonne National Laboratory (ANL), Argonne, IL
Country of Publication:
United States
filtered; cathodic; deposition; apparatus; method; filtered; cathodic; deposition; method; apparatus; production; highly; dense; wear; resistant; coatings; free; macro; particles; filtered; cathodic; deposition; apparatus; shaped; vacuum; chamber; houses; cathode; target; evaporable; surface; comprised; coating; material; means; generating; stream; plasma; means; generating; transverse; magnetic; field; macro; particle; deflector; transverse; magnetic; field; bends; generated; stream; plasma; direction; substrate; macro; particles; effectively; filtered; stream; plasma; traveling; unaffected; transverse; magnetic; field; initial; path; plasma; stream; macro; particle; deflector; macro; particle; deflector; preformed; surface; deflects; macro; particles; substrate; resistant coating; deposition method; coating material; vacuum chamber; magnetic field; magnetic field; magnetic field; transverse magnetic; transverse magnetic; transverse magnetic; resistant coatings; deposition apparatus; deposition apparatus; wear resistant; filtered cathodic; filtered cathodic; filtered cathodic; highly dense /204/427/