Thin film hydrogen sensor
Abstract
A hydrogen sensor element comprises an essentially inert, electrically-insulating substrate having a thin-film metallization deposited thereon which forms at least two resistors on the substrate. The metallization comprises a layer of Pd or a Pd alloy for sensing hydrogen and an underlying intermediate metal layer for providing enhanced adhesion of the metallization to the substrate. An essentially inert, electrically insulating, hydrogen impermeable passivation layer covers at least one of the resistors, and at least one of the resistors is left uncovered. The difference in electrical resistances of the covered resistor and the uncovered resistor is related to hydrogen concentration in a gas to which the sensor element is exposed.
- Inventors:
-
- Oak Ridge, TN
- Knoxville, TN
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 869618
- Patent Number(s):
- US 5367283
- Assignee:
- Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- film; hydrogen; sensor; element; comprises; essentially; inert; electrically-insulating; substrate; thin-film; metallization; deposited; thereon; forms; resistors; layer; pd; alloy; sensing; underlying; intermediate; metal; providing; enhanced; adhesion; electrically; insulating; impermeable; passivation; covers; left; uncovered; difference; electrical; resistances; covered; resistor; related; concentration; gas; exposed; sensor element; passivation layer; hydrogen sensor; film hydrogen; essentially inert; hydrogen concentration; electrically insulating; metal layer; electrical resistance; deposited thereon; providing enhanced; metallization deposited; element comprises; film metal; insulating substrate; electrically-insulating substrate; enhanced adhesion; /338/73/422/
Citation Formats
Lauf, Robert J, Hoffheins, Barbara S, and Fleming, Pamela H. Thin film hydrogen sensor. United States: N. p., 1994.
Web.
Lauf, Robert J, Hoffheins, Barbara S, & Fleming, Pamela H. Thin film hydrogen sensor. United States.
Lauf, Robert J, Hoffheins, Barbara S, and Fleming, Pamela H. 1994.
"Thin film hydrogen sensor". United States. https://www.osti.gov/servlets/purl/869618.
@article{osti_869618,
title = {Thin film hydrogen sensor},
author = {Lauf, Robert J and Hoffheins, Barbara S and Fleming, Pamela H},
abstractNote = {A hydrogen sensor element comprises an essentially inert, electrically-insulating substrate having a thin-film metallization deposited thereon which forms at least two resistors on the substrate. The metallization comprises a layer of Pd or a Pd alloy for sensing hydrogen and an underlying intermediate metal layer for providing enhanced adhesion of the metallization to the substrate. An essentially inert, electrically insulating, hydrogen impermeable passivation layer covers at least one of the resistors, and at least one of the resistors is left uncovered. The difference in electrical resistances of the covered resistor and the uncovered resistor is related to hydrogen concentration in a gas to which the sensor element is exposed.},
doi = {},
url = {https://www.osti.gov/biblio/869618},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1994},
month = {Sat Jan 01 00:00:00 EST 1994}
}
Works referenced in this record:
Hydrogen sensing with palladiumācoated optical fibers
journal, October 1988
- Butler, M. A.; Ginley, D. S.
- Journal of Applied Physics, Vol. 64, Issue 7
Bimetal Strip Hydrogen Gas Detectors
journal, July 1969
- Shaver, P. J.
- Review of Scientific Instruments, Vol. 40, Issue 7