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Title: Thin film hydrogen sensor

A hydrogen sensor element comprises an essentially inert, electrically-insulating substrate having a thin-film metallization deposited thereon which forms at least two resistors on the substrate. The metallization comprises a layer of Pd or a Pd alloy for sensing hydrogen and an underlying intermediate metal layer for providing enhanced adhesion of the metallization to the substrate. An essentially inert, electrically insulating, hydrogen impermeable passivation layer covers at least one of the resistors, and at least one of the resistors is left uncovered. The difference in electrical resistances of the covered resistor and the uncovered resistor is related to hydrogen concentration in a gas to which the sensor element is exposed.
 [1] ;  [2] ;  [1]
  1. (Oak Ridge, TN)
  2. (Knoxville, TN)
Publication Date:
OSTI Identifier:
Report Number(s):
US 5367283
DOE Contract Number:
Resource Type:
Research Org:
Country of Publication:
United States
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