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Title: Filtered cathodic arc source

A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.
Authors:
 [1] ;  [1]
  1. (Livermore, CA)
Publication Date:
OSTI Identifier:
869128
Report Number(s):
US 5279723
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Patent
Research Org:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Country of Publication:
United States
Language:
English
Subject:
filtered; cathodic; source; continuous; cathodic; source; coupled; macro-particle; filter; capable; separation; elimination; macro-particles; flux; produced; cathodic; discharge; source; employs; axial; magnetic; field; cathode; target; tapered; confine; providing; target; material; utilization; bent; magnetic; field; guide; metal; target; coated; macro-particle; filter; consists; straight; solenoids; placed; 45; degree; prevents; line-of-sight; spot; target; coated; provides; path; electrons; flow; series; baffles; trapping; macro-particles; axial magnetic; flux produced; magnetic field; magnetic field; target material; particle filter; particle filter; filtered cathodic; source coupled; target mater /204/250/313/427/