U.S. Department of EnergyOffice of Scientific and Technical Information
Filtered cathodic arc source
Abstract
A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.
- Inventors:
-
- Livermore, CA
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 869128
- Patent Number(s):
- US 5279723
- Assignee:
- as represented by United States Department of Energy (Washington, DC)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- filtered; cathodic; source; continuous; coupled; macro-particle; filter; capable; separation; elimination; macro-particles; flux; produced; discharge; employs; axial; magnetic; field; cathode; target; tapered; confine; providing; material; utilization; bent; guide; metal; coated; consists; straight; solenoids; placed; 45; degree; prevents; line-of-sight; spot; provides; path; electrons; flow; series; baffles; trapping; axial magnetic; flux produced; magnetic field; target material; particle filter; filtered cathodic; source coupled; target mater; /204/250/313/427/
Citation Formats
Falabella, Steven, and Sanders, David M. Filtered cathodic arc source. United States: N. p., 1994.
Web.
Falabella, Steven, & Sanders, David M. Filtered cathodic arc source. United States.
Falabella, Steven, and Sanders, David M. 1994.
"Filtered cathodic arc source". United States. https://www.osti.gov/servlets/purl/869128.
@article{osti_869128,
title = {Filtered cathodic arc source},
author = {Falabella, Steven and Sanders, David M},
abstractNote = {A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.},
doi = {},
url = {https://www.osti.gov/biblio/869128},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1994},
month = {Sat Jan 01 00:00:00 EST 1994}
}
Works referenced in this record:
Coating technology based on the vacuum arc-a review
journal, January 1990
- Sanders, D. M.; Boercker, D. B.; Falabella, S.
- IEEE Transactions on Plasma Science, Vol. 18, Issue 6
Review of ion‐based coating processes derived from the cathodic arc
journal, May 1989
- Sanders, David M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 7, Issue 3
Comparison of two filtered cathodic arc sources
journal, March 1992
- Falabella, S.; Sanders, D. M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 2